Nanotribology of Ultrathin and Hard Amorphous Carbon Films
Diamond material and its smooth coatings are used for very low wear and relatively low friction. Major limitations of the true diamond coatings are that they need to be deposited at high temperatures, can only be deposited on selected substrates, and requ
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Nanotribology 26.1 Description of Commonly Used Deposition Techniques .................. 26.1.1 Filtered Cathodic Arc Deposition Technique .................................. 26.1.2 Ion Beam Deposition Technique .... 26.1.3 Electron Cyclotron Resonance Chemical Vapor Deposition Technique .................................. 26.1.4 Sputtering Deposition Technique... 26.1.5 Plasma-Enhanced Chemical Vapor Deposition Technique ..................
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26.2 Chemical Characterization and Effect of Deposition Conditions on Chemical Characteristics and Physical Properties ... 26.2.1 EELS and Raman Spectroscopy....... 26.2.2 Hydrogen Concentrations ............. 26.2.3 Physical Properties ...................... 26.2.4 Summary ...................................
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26.3 Micromechanical and Tribological Characterizations of Coatings Deposited by Various Techniques........................... 26.3.1 Micromechanical Characterization . 26.3.2 Microscratch and Microwear Studies ................ 26.3.3 Macroscale Tribological Characterization.......................... 26.3.4 Coating Continuity Analysis...........
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References .................................................. 827 be performed using either a nanoindenter or an AFM. Thin coatings deposited by filtered cathodic arc, ion beam, and ECR-CVD hold a promise for tribological applications. Coatings as thin as 5 nm or even thinner provide wear protection. Microscratch, microwear, and accelerated wear testing, if simulated properly, can be successfully used to screen coating candidates for industrial applications. In the examples shown in this chapter, trends observed in the microscratch, microwear, and accelerated macrofriction wear tests are similar to that found in functional tests. In this chapter, the state-of-the-art of recent developments in the chemical, mechanical, and tribological characterization of ultrathin amorphous carbon coatings is presented.
Part D 26
Diamond material and its smooth coatings are used for very low wear and relatively low friction. Major limitations of the true diamond coatings are that they need to be deposited at high temperatures, can only be deposited on selected substrates, and require surface finishing. Hard amorphous carbon, commonly known as diamond-like carbon or DLC coatings, exhibit mechanical, thermal, and optical properties close to that of diamond. These can be deposited with a large range of thicknesses by using a variety of deposition processes on a variety of substrates at or near room temperature. The coatings reproduce substrate topography, avoiding the need of post-finishing. Friction and wear properties of some DLC coatings can be very attractive for tribological applications. The largest industrial application of these coatings is in magnetic storage devices. The prevailing atomic arrangement in the DLC coatings is amorphous or quasi-amorphous with small diamond, graphite, and other unidentifiable micro- or nanocrystallites. Most DLC coatings, except those produce
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