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289

Mat. Res. Soc. Symp. Proc. Vol. 623 © 2000 Materials Research Society

CONCLUSION The possibility of the diffusitives measurement in thin film was shown. The values obtained are in good agreement with those for bulk material, being naturally higher for possible electric field existence originated from oxygene species adsorbed. The fieled accelerates oxygene ions as it is shown for thin films oxidation

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