Passive wireless UV SAW sensor

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Passive wireless UV SAW sensor G. Ya. Karapetyan1   · V. E. Kaydashev2 · M. E. Kutepov1 · T. A. Minasyan1 · V. A. Kalinin3 · V. O. Kislitsyn3 · E. M. Kaidashev1 Received: 10 January 2020 / Accepted: 7 September 2020 © Springer-Verlag GmbH Germany, part of Springer Nature 2020

Abstract This paper presents studies of a passive wireless ultraviolet (UV) surface acoustic wave (SAW) sensor operating in the frequency range 436–440 MHz. The sensor contains two SAW delay lines (DLs). The first DL is measuring, and the second is the reference. In the measuring DL, receiving–transmitting inter-digital transducer (IDT) is connected to the antenna and the sensing element zinc oxide film. In the reference DL, the receiving–transmitting IDT is connected to another antenna and does not contain a UV-sensitive element. Two methods of information reading from the sensor are proposed: based on the Fourier transform of the frequency dependence of the parameter S11 of the reader antenna and using reading pulses of 1.5-μs duration, which have carrier frequencies corresponding to the central frequencies of the measuring and reference channels. The sensor can measure UV intensities from 10 to 40,000 μW/cm2 with a maximum sensitivity of 6000 ppm/(μW/ cm2) at low intensities, and which rapidly decreases as the UV intensity increases (less than 100 ppm at the UV intensity of 40,0000 µw/cm2). Keywords  SAW device · UV light sensor · ZnO films · Interdigital transducer · Interdigital system · External impedance

1 Introduction The problem of wireless remote control of physical parameters [pressure, deformations, temperature, intensity of ultraviolet (UV) radiation, etc.] is currently being solved with the help of various sensors by radio signal, i.e. a radio transmitter is attached to the sensor, which carries out wireless transmission of information from the sensor. But the transmitter requires a power source. Therefore, the use of passive sensors, where there is no need to replace the power source, is an urgent task, including measuring the intensity of UV radiation. UV radiation sensors are widely used in space environmental monitoring systems (changes in the ozone layer and atmospheric pollution), security systems, space * G. Ya. Karapetyan [email protected] 1



Laboratory of Nanomaterials, Southern Federal University, Stachki 200/1, 344090 Rostov‑on‑Don, Russia

2



Moscow Institute of Physics and Technology, 9 Institutskiy per., 141701 Dolgoprudny, Russia

3

LLC STC “RUS”, Maly av., V. I. 54, Built 5, 199178 Saint Petersburg, Russia



communications, control for corona discharges on power transmission lines and astrophysical research [1–3]. One of the areas of research in this field is the creation of surface acoustic wave (SAW) UV radiation sensors [4–16]. Currently, passive wireless sensors of temperature [17, 18], magnetic field [19], deformation [20], and the concentration of various gases [21] based on SAWs are being investigated. In the proposed work, for the first time, we propose a passive wireless SAW UV sensor. In [