Phase Transformations in Titanium Oxide Evaporated Films by Annealing
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PHASE TRANSFORMATIONS IN TITANIUM OXIDE EVAPORATED FILMS BY ANNEALING
Y. YAMADA, K. YOSHIDA, H. OTA,* SHEN GUANG JUN,** L. A. BURSILL** and A. E. C. SPARGO* * College of General Education, Tohoku University, Kawauchi, Sendai 980, Japan; t lMV Electron Microscopic Laboratory, Tohoku University, Katahira, Sendai 980, Japan; **School of Physics, University of Melbourne, Parkville 3052, Australia
ABSTRACT The process of the phase transformation of evaporated films of TiO 0 . 5 has been demonstrated by in situ annealing using an electron microscope. Single crystals of the 6-phase, whose structure is identified with Andersson's hexagonal model, precipitate during annealing. Crystal structure images in cooperation with the calculated images reveal that the inner parts of the 6-phase crystal have various thickness. The transition structures I and H having ordered vacancies of titanium and oxygen respectively also appear on annealing. The difference in the distortion of their lattices from the parent rock-salt type lattice suggests that the effective atomic volume of titanium is larger than that of oxygen in the crystal of the transition structure. The observed transformations, t-phase - 5-phase - transition structure, are explained by consideration of the structural relationships among these phases.
INTRODUCTION 2
The crystal structure of the TiOx(O
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