Photoluminescence Properties of Mn-doped Zinc Silicates Synthesized by Combinatorial Sputtering Technique
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0894-LL02-06.1
Photoluminescence Properties of Mn-doped Zinc Silicates Synthesized by Combinatorial Sputtering Technique Lih-Ping Wang; Wen-Hsuan Chao; Shu-Huei Wang; Tien-Heng Huang; Ren-Jye Wu Union Chemical Laboratories, Industrial Technology Research Institute, Hsinchu 31040, Taiwan, R.O.C. ABSTRACT The photoluminescence (PL) properties of Mn-doped zinc silicates were studied by combinatorial synthesis and characterization technique associated with various process parameters. The material libraries were prepared with composition spreading in Zn and Mn concentration. The PL emission was green or orange, and depended strongly on the stoichiometry of the zinc silicates and the annealing temperature. The orange emission was observed in Mn-doped zinc silicates annealed at 800°C, which attributed to the increase of crystal field in a highly non-stoichiometric α-Zn2SiO4 phase ((Zn+Mn)/Si
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