Processing Complex and Uniform Nanoparticles for Microelectronic and Photonic Applications
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Processing Complex And Uniform Nanoparticles For Microelectronic And Photonic Applications Nobuyuki Kambe NanoGram Corporation, Fremont, CA 94538, U.S.A.
ABSTRACT Two major challenges that exist in order to utilize nanoparticles as building blocks for microelectronic and photonic applications are presented. The first challenge is how to make uniform nanoparticles in industrial-scale. The second challenge is how to convert these nano-building blocks to application forms such as device structures or coatings. In this paper, materials and processing guidelines to provide the solutions for these challenges are described on the basis of (a) laser-driven chemical reaction processes to generate a versatile range of nanoparticles having extremely narrow size distributions, and (b) unique organic-inorganic nanocomposites using surface engineering over nanoparticles. As promising applications, direct deposition of nanoparticles and nanocomposites are discussed in conjunction with planar lightwave devices, photonic nanocomposites for the refractive index engineering, and planarization processes for electronic chips. INTRODUCTION Nanoparticles are a new class of material building blocks for microelectronic and photonic applications because of their size and unique physical properties [1,2]. A state-of-the-art Si chip patterning rule for ULSI has already been in a scale of close to 0.1 µm , i.e., 100 nm. Photonic device structures for optical fiber telecommunications have also been in submicron scale. Therefore, it may be natural to use uniform nanoscale building blocks to build these electronic and photonic device structures. In order to be implemented industrially, however, two major challenges must be overcome. The first challenge is how to make uniform nanoparticles in industrial-scale, while multi-component complex materials must be synthesized to meet very diversified device performance goals. The second challenge is how to convert these nano-building blocks to application forms such as device structures or coatings. NanoGram has developed and proven laser-driven chemical reaction processes as an enabling tool to generate a versatile range of nanoparticles with unparalleled uniformity in size and shape. A high level of uniformity enables the subsequent processing of nanomaterials that covers from dispersion in liquid to film deposition as well as organic-inorganic nanocomposites. In this paper, guidelines of processing nanoparticles are provided in terms of such quality parameters as degree of particulate agglomeration, primary particle size distribution, and surface modification. First, NanoGram’s production process and nanoparticles are outlined and scalability issues are discussed. Then dispersion of “preformed” nanoparticles in solvents is discussed, as this is a significant process issue when nanocomposites or coatings are targeted. Processing of organic-inorganic nanocomposites based on chemical bond formation is subsequently described. Industrial applications enabled by these processing developments, including plan
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