Production Planning and Control for Semiconductor Wafer Fabrication Facilities
Over the last fifty-plus years, the increased complexity and speed of integrated circuits have radically changed our world. Today, semiconductor manufacturing is perhaps the most important segment of the global manufacturing sector. As the semiconductor i
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Volume 52
Series Editors: Ramesh Sharda Oklahoma State University, Stillwater, Oklahoma, USA Stefan Voß University of Hamburg, Hamburg, Germany
For further volumes: http://www.springer.com/series/6375
Lars Mönch • John W. Fowler • Scott J. Mason
Production Planning and Control for Semiconductor Wafer Fabrication Facilities Modeling, Analysis, and Systems
123
Lars Mönch Department of Mathematics and Computer Science University of Hagen Universitätsstraße 1 Hagen, Germany
John W. Fowler W.P. Carey School of Business Department of Supply Chain Management Arizona State University Tempe, AZ, USA
Scott J. Mason Department of Industrial Engineering Clemson University Freeman Hall 124 Clemson, SC, USA
ISSN 1387-666X ISBN 978-1-4614-4471-8 ISBN 978-1-4614-4472-5 (ebook) DOI 10.1007/978-1-4614-4472-5 Springer New York Heidelberg Dordrecht London Library of Congress Control Number: 2012944171 c Springer Science+Business Media New York 2013 This work is subject to copyright. All rights are reserved by the Publisher, whether the whole or part of the material is concerned, specifically the rights of translation, reprinting, reuse of illustrations, recitation, broadcasting, reproduction on microfilms or in any other physical way, and transmission or information storage and retrieval, electronic adaptation, computer software, or by similar or dissimilar methodology now known or hereafter developed. Exempted from this legal reservation are brief excerpts in connection with reviews or scholarly analysis or material supplied specifically for the purpose of being entered and executed on a computer system, for exclusive use by the purchaser of the work. Duplication of this publication or parts thereof is permitted only under the provisions of the Copyright Law of the Publisher’s location, in its current version, and permission for use must always be obtained from Springer. Permissions for use may be obtained through RightsLink at the Copyright Clearance Center. Violations are liable to prosecution under the respective Copyright Law. The use of general descriptive names, registered names, trademarks, service marks, etc. in this publication does not imply, even in the absence of a specific statement, that such names are exempt from the relevant protective laws and regulations and therefore free for general use. While the advice and information in this book are believed to be true and accurate at the date of publication, neither the authors nor the editors nor the publisher can accept any legal responsibility for any errors or omissions that may be made. The publisher makes no warranty, express or implied, with respect to the material contained herein. Printed on acid-free paper Springer is part of Springer Science+Business Media (www.springer.com)
Preface
Semiconductor manufacturing is one of the most important segments of the global manufacturing sector. Today semiconductor wafer fabrication facilities, for short called wafer fabs in the rest of this monograph, can be found in the USA, Europe, and Asia. Starting in the m
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