Properties of borosilicate glass/Al 2 O 3 composites with different Al 2 O 3 concentrations for LTCC applications

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Properties of borosilicate glass/Al2O3 composites with different ­Al2O3 concentrations for LTCC applications Xianfu Luo1,2   · Huajie Tao1,2 · Pengzhen Li1,2 · Yao Fu1,2 · Hongqing Zhou1,2 Received: 27 May 2020 / Accepted: 6 July 2020 © Springer Science+Business Media, LLC, part of Springer Nature 2020

Abstract This article aims to investigate the effect of ­Al2O3 in borosilicate glass on the sintering densification and properties of the borosilicate glass/Al2O3 LTCC composites. A series of CaO–Al2O3–B2O3–SiO2 (CABS) glass with different concentrations of ­Al2O3 was synthesized, as well as the CABS glass/Al2O3 LTCC composites. The influence of A ­ l2O3 on the sintering densification, phase composition, microstructures and properties of the CABS glass/Al2O3 LTCC composites was then systematically investigated. Result indicates that a proper amount of A ­ l2O3 in CABS glass not only can strengthen the structural stability of the borosilicate glass, but also can promote the sintering densification and improve the properties of the glass/ ceramic composites. CABS glass/Al2O3 composites prepared with CABS glass of 4 wt.% ­Al2O3 sintered at 875 °C exhibits excellent properties of a sintering density of 3.13 g/cm3, a Z axial shrinkage of 15.5%, a dielectric constant (εr) of 8.08, a dielectric loss (tanδ) of 0.9 × 10–3 (at 7 GHz), a coefficient of thermal expansion (CTE) of 5.35 ppm/°C, a flexural strength of 206 MPa, demonstrating its great potential for LTCC applications.

1 Introduction With the demand for miniaturization and integration of electronic components, increasingly significance has been attached to microelectronic packaging technology in the wireless communication industry [1–3]. Low temperature co-fired ceramic (LTCC), which integrates the interconnected conductors, passive components, and packaging technology on a multi-layer ceramic substrate, has emerged as one of the most promising candidates for microelectronic packaging [4]. LTCC materials, as the core of LTCC technology, have claimed widespread attention over the past decades, owing to their viable merits, for instance, the intrinsically low sintering temperature (≤ 1000 °C), being capable of co-firing with internal electrodes made of highconductivity metals (Au, Ag and Cu, etc.), and the outstanding mechanical, thermal, and microwave dielectric properties [5, 6]. LTCC materials are widely utilized to fabricate * Hongqing Zhou [email protected] 1



College of Materials Science and Engineering, Nanjing Tech University, Nanjing 210009, China



Jiangsu Collaborative Innovation Center for Advanced Inorganic Function Composites, Nanjing Tech University, Nanjing 210009, China

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multichip-integrated circuits and modules in the wireless communication, computer hardware, and automotive electronics industries, demonstrating broad application prospects [7]. The low sintering temperature of the LTCC materials is achieved by generating a large amount of liquid phase during the sintering process. According to their composition, the LTCC materials can be d