Recent Progress in Up-Scaling of Amorphous and Micromorph Thin Film Silicon Solar Cells to 1.4 m 2 Modules

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0989-A24-01

Recent Progress in Up-Scaling of Amorphous and Micromorph Thin Film Silicon Solar Cells to 1.4 m2 Modules Johannes Meier1, Ulrich Kroll1, Stefano Benagli1, Tobias Roschek2, Andreas Huegli2, Joel Spitznagel1, Oliver Kluth2, Daniel Borello1, Michael Mohr2, Dmitri Zimin2, Giovanni Monteduro1, Jiri Springer2, Christoph Ellert2, Girogios Androutsopoulos1, Gerold Buechel2, Arno Zindel2, Franz Baumgartner3, and Detlev Koch-Ospelt2 1 Oerlikon Solar-Lab S.A., Puits-Godet 6a, Neuch‚tel, CH-2000, Switzerland 2 OC Oerlikon Balzers A.G., Balzers, LI-9496, Liechtenstein 3 University of Applied Science Buchs, Werdenbergstrasse 4, Buchs, CH-9471, Switzerland ABSTRACT In this paper an overview of our developments towards industrialization of thin film silicon PV modules is presented. Amorphous silicon p-i-n solar cells have been developed in medium size single-chamber R&D KAI-M PECVD reactors. High initial efficiencies of 10.6 % and stabilized of 8.6 % could be achieved for a 1 cm2 a-Si:H p-i-n solar cell of 0.20 µm thick ilayer deposited on TCO from Asahi U type (SnO2). On our in-house developed LPCVD ZnO we could further improve the stabilized a-Si:H p-i-n efficiency to a similar level of 8.5 %. Incorporating such cells in commercial available front TCO of lower quality still leads to high initial mini-module aperture efficiencies (10 x 10 cm2) of 9.1% and stabilized ones of 7.46% (independently measured by ESTI JRC-Ispra). Transferring the processes from the KAI-M to the industrial size 1.1x1.25 m2 KAI-1200 R&D reactors resulted in a-Si:H modules of 110.6 W using commercial TCO, respectively 112.4 W when applying in-house developed LPCVD front ZnO. Both initial module performances have been independently measured by ESTI laboratories of JRC Ispra. A typical temperature coefficient for the module power of -0.22 %/∞C (relative loss) has been deduced from temperature dependent I-V characteristics at ESTI laboratories of JRC Ispra. Finally, micromorph mini-modules of 10 % initial aperture efficiency have been fabricated.

INTRODUCTION The shortage in crystalline silicon for the PV industry calls for alternative solar cell concepts like thin film solar cells. Various studies have led to the conclusion that thin film PV has a higher potential for cost reduction compared to conventional wafer-based silicon PV [1-3]. Due its considerably reduced quantity of the absorber material, herein, thin film silicon has a huge potential as its technology is based on non-toxic and highly abundant materials involved. From all types of thin film solar cells amorphous silicon technology has shown to be the most advanced concept having already the potential for GW-mass production [3]. One main cause why thin film solar cells have not achieved the growth of crystalline PV is the lack of large-area production equipment. In addition, the built-up of a thin film silicon PV manufacturing line requires still a higher initial investment for the equipment than for c-Si lines. Since the early 90ies the development of large-area PECVD reactors for am