Recoil Implantation of Ito thin Films on Glass Substrates *
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RECOIL IMPLANTATION OF ITO THIN FILMS ON GLASS SUBSTRATES* B. H. RABIN,
B. B.
HARBISON AND S.
R. SHATYNSKI
Materials Engineering Department Rensselaer Polytechnic Institute Troy, NY 12181
ABSTRACT Indium-Tin Oxide (ITO)
heat mirror films implanted
into window glass were obtained by post annealing of
argon irradiated coatings of In-5w/o Sn produced by reactive evaporation in oxygen. Characterization of coatings has been carried out using TEN and AES.
Optical proper-
ties have also been evaluated. The production of acceptable thin films requires low energy deposition rates during ion bombardment. This places a limit on the extent of film-substrate mixing, which is required if increased film lifetimes are to be realized. INTRODUCTION The development of a successful solar window relies upon the ability to produce a suitable wavelength selective surface. Heat mirror applications require thin films on window glass that exhibit high visible transmission
and high infrared reflection characteristics. environmentally stable.
The window must also be
Recent work has confirmed the effectiveness of
intrinsic and doped semiconducting oxides for heat mirror applications [1]. Thin films are typically produced by a variety of deposition techniques including chemical vapor deposition, sputtering or reactive sputtering, and evaporation or reactive evaporation. Our laboratory has focused on ITO
films prepared by a reactive evaporation technique. Suitable optical properties have previously been obtained by reactive evaporation onto substrates heated up to 3000 C, or by depositing onto room temperature substrates and then annealing in air.
The particular ITO structure produced
depends strongly upon the deposition technique and conditions [2]. substitute for In in
In 2 0 3 in
the form of In2
Snx
0
Sn may
3-2x, or form small
neutral tin clusters [3]. Optical properties and surface analysis [4] have shown films produced in our laboratory consist mostly of bcc In2 0 3 with substitutional Sn. A small amount of unoxidized alloy is also present. Such ITO films on glass substrates are intended to withstand abrasion and corrosion under prolonged atmospheric exposure. It has been demonstrated that the adhesion of metallic films to glass substrates can be greatly enhanced by ion bombardment [5]. To the best of the authors' knowledge, increased adhesion of oxide films to glass substrates by ion bombardment has not been reported. Oxide adhesion to glass, initially greater than metallic adhesion, can also be improved by ion bombardment based upon structural continuity arguments [6]. The stability of the thin film structure during irradiation must also be considered [7]. This study presents initial *The authors are thankful to Professor Stephen R. Shatynski who unfortunately was killed on September 23, 1983. Without his guidance and energies this research would not have been possible. Barry Rabin is a General Electric Company Fellow. The authors also acknowledge the support of Consolidated Edison of New York under Grant No.1-049
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