Self-Powered and Soft Polymer MEMS/NEMS Devices
This book explores the fabrication of soft material and biomimetic MEMS sensors, presents a review of MEMS/NEMS energy harvesters and self-powered sensors, and focuses on the recent efforts in developing flexible and wearable piezoelectric nanogenerators.
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Ajay Giri Prakash Kottapalli Kai Tao Debarun Sengupta Michael S. Triantafyllou
Self-Powered and Soft Polymer MEMS/NEMS Devices
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SpringerBriefs in Applied Sciences and Technology
SpringerBriefs present concise summaries of cutting-edge research and practical applications across a wide spectrum of fields. Featuring compact volumes of 50 to 125 pages, the series covers a range of content from professional to academic. Typical publications can be: • A timely report of state-of-the art methods • An introduction to or a manual for the application of mathematical or computer techniques • A bridge between new research results, as published in journal articles • A snapshot of a hot or emerging topic • An in-depth case study • A presentation of core concepts that students must understand in order to make independent contributions SpringerBriefs are characterized by fast, global electronic dissemination, standard publishing contracts, standardized manuscript preparation and formatting guidelines, and expedited production schedules. On the one hand, SpringerBriefs in Applied Sciences and Technology are devoted to the publication of fundamentals and applications within the different classical engineering disciplines as well as in interdisciplinary fields that recently emerged between these areas. On the other hand, as the boundary separating fundamental research and applied technology is more and more dissolving, this series is particularly open to trans-disciplinary topics between fundamental science and engineering. Indexed by EI-Compendex, SCOPUS and Springerlink. More information about this series at http://www.springer.com/series/8884
Ajay Giri Prakash Kottapalli • Kai Tao Debarun Sengupta • Michael S. Triantafyllou
Self-Powered and Soft Polymer MEMS/NEMS Devices
Ajay Giri Prakash Kottapalli Department of Advanced Production Engineering, Engineering and Technology Institute Groningen (ENTEG), Faculty of Science and Engineering University of Groningen Nijenborgh, Groningen, The Netherlands MIT Sea Grant College Programme Massachusetts Institute of Technology Cambridge, MA, USA
Kai Tao Northwestern Polytechnical University Xi’an, Shanxi, China Michael S. Triantafyllou MIT Sea Grant College Programme Massachusetts Institute of Technology Cambridge, MA, USA
Debarun Sengupta Department of Advanced Production Engineering University of Groningen Groningen, The Netherlands
ISSN 2191-530X ISSN 2191-5318 (electronic) SpringerBriefs in Applied Sciences and Technology ISBN 978-3-030-05553-0 ISBN 978-3-030-05554-7 (eBook) https://doi.org/10.1007/978-3-030-05554-7 Library of Congress Control Number: 2018965413 © The Author(s), under exclusive licence to Springer Nature Switzerland AG 2019 This work is subject to copyright. All rights are reserved by the Publisher, whether the whole or part of the material is concerned, specifically the rights of translation, reprinting, reuse of illustrations, recitation, broadcasting, reproduction on microfilms or in any other physical way, and transmission or information storag
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