Shape Optimization for a Single Valve Vacuum Chuck Using Two-Way FSI Analysis
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Shape Optimization for a Single Valve Vacuum Chuck Using Two‑Way FSI Analysis Dae‑Hwan Moon1 · Seog‑Young Han1 Received: 15 October 2019 / Revised: 31 July 2020 / Accepted: 12 August 2020 © Korean Society for Precision Engineering 2020
Abstract This study aims to optimize the inner shape of a single valve vacuum chuck to prevent flexible film from wrinkling and shorten the inspect time. Hence, this study developed a two-way fluid–structure interaction (FSI) analysis between the film and its surrounding airflow to simulate film adsorption in a porous ceramic on a single vacuum chuck. Next, the team optimized airflow velocity for the film to achieve the quickest adsorption of the porous ceramic sample in the shortest time. Finally, the vacuum chuck shape was optimized using the optimum airflow velocity profile. The Darcy–Forchheimer and Mooney–Rivlin equations were simulated to calculate the airflow through the porous ceramic and the hyper-elastic material, respectively. The B-spline curve was used to optimize the inner shape of the vacuum chuck. Adsorption tests of single- and multiple-valve vacuum chucks with optimized internal shapes were performed to verify the validity of the simulation results and compare the performance. The optimized vacuum chuck prevented film wrinkling, and the inspection time was reduced by 66% compared to the conventional multiple-valve vacuum chuck. The error between the simulation and the experimental results was within 2.5%. The techniques of the developed two-way FSI analysis and the vacuum chuck shape optimization will greatly contribute to the display and semiconductor industries. Keywords Vacuum chuck · Film wrinkling · Two-way fluid–structure interaction (FSI) · Hyper-elastic material · Shape optimization
1 Introduction Flexible film has been chosen the most promising component leading the next generation of displays over the past few years due to its superior electronic performance [1]. From these many research results and the advantages of the flexible film, it has been used as a key component in the electronic flat panel display industry for the past decade such as X-ray scattering, electrode printing, etching, cooling, heating, and thinning [2, 3]. Originally, vacuum chucks used a single valve, locally adsorbing only where the suction hole existed, and the film was often twisted and damaged [4–6]. To solve this problem, researchers established a mathematical model [18] in which the film is twisted and an engineering stress monitor is applied [7]. However, the actual phenomenon remained * Seog‑Young Han [email protected] 1
School of Mechanical Engineering, Hanyang University, 222 Wangsimni‑ro, Seongdong‑gu, Seoul 133‑791, South Korea
inaccurately modeled. Accordingly, this study implemented a multiple-valve chuck using a solenoid as shown in Fig. 1. This solved the abovementioned problems. The apparatus was complicated, however, and the film inspection time was delayed compared to the single valve chuck [8].
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