Silicon Anodization as a Structuring Technique Literature Review, Mo
Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work co
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Silicon Anodization as a Structuring Technique Literature Review, Modeling and Experiments
Silicon Anodization as a Structuring Technique
Alexey Ivanov
Silicon Anodization as a Structuring Technique Literature Review, Modeling and Experiments
Alexey Ivanov Freiburg im Breisgau, Germany Dissertation Albert-Ludwigs-Universität Freiburg, 2016
ISBN 978-3-658-19237-2 ISBN 978-3-658-19238-9 (eBook) https://doi.org/10.1007/978-3-658-19238-9 Library of Congress Control Number: 2017949671 Springer Vieweg © Springer Fachmedien Wiesbaden GmbH 2018 This work is subject to copyright. All rights are reserved by the Publisher, whether the whole or part of the material is concerned, specifically the rights of translation, reprinting, reuse of illustrations, recitation, broadcasting, reproduction on microfilms or in any other physical way, and transmission or information storage and retrieval, electronic adaptation, computer software, or by similar or dissimilar methodology now known or hereafter developed. The use of general descriptive names, registered names, trademarks, service marks, etc. in this publication does not imply, even in the absence of a specific statement, that such names are exempt from the relevant protective laws and regulations and therefore free for general use. The publisher, the authors and the editors are safe to assume that the advice and information in this book are believed to be true and accurate at the date of publication. Neither the publisher nor the authors or the editors give a warranty, express or implied, with respect to the material contained herein or for any errors or omissions that may have been made. The publisher remains neutral with regard to jurisdictional claims in published maps and institutional affiliations. Printed on acid-free paper This Springer Vieweg imprint is published by Springer Nature The registered company is Springer Fachmedien Wiesbaden GmbH The registered company address is: Abraham-Lincoln-Str. 46, 65189 Wiesbaden, Germany
Dedicated to my family.
Contents
Abstract
XI
Zusammenfassung Nomenclature
XV XIX
1 Introduction 1.1 Overview: silicon anodization . . . . . . . . . . . . . . . . . . 1.2 Objectives and outline of the work . . . . . . . . . . . . . . .
1 1 3
2 State of the art 2.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2.2 Structuring techniques for semiconductor based smart systems 2.2.1 Principles and characteristics of structuring processes 2.2.2 Fabrication strategies for smart systems . . . . . . . . 2.2.3 Structuring techniques . . . . . . . . . . . . . . . . . . 2.2.4 Conclusions . . . . . . . . . . . . . . . . . . . . . . . . 2.3 Mass and charge transfer in silicon and electrolyte . . . . . . 2.3.1 Band diagram and transfer of charge and mass in bulk p-type silicon . . . . . . . . . . . . . . . . . . . . . . . 2.3.2 Band diagram and transfer of charge and mass in bulk electrolyte . . . . . . . . . . . . . . . . . . . . . . . . . 2.3.3 Interface silicon-electrolyte . . . . . . . . . . . . . . . 2.4 Silicon anodiz
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