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MRS Advances © 2019 Materials Research Society DOI: 10.1557/adv.2019.130

SiO2 and TiO2 Sol-Gel Blends with Tunable Optical and Electronic Properties Stephanie Arouh, Roland Himmelhuber, Robert A. Norwood College of Optical Sciences, The University of Arizona, 1630 E University Blvd, Tucson, AZ 85719, U.S.A.

Abstract Sol-gel blends are created using a combination of a high refractive index (n~2.4) TiO2 based sol-gel and a low refractive index (n~1.5) SiO2 based sol-gel. The blends are prepared with different ratios of sol-gels and films are created using the spin coating method on silicon and ITO-on-glass substrates. The film thickness, refractive index, and dielectric constants of the resulting films are measured using profilometry, prism coupling, and LCR measurements, respectively. Results show that including more SiO2 based sol-gel in the initial mixture creates thicker films ranging from 1-7 μm, but results in lower refractive index and lower dielectric constants. This is consistent with expectations due to SiO2 having a lower refractive index and dielectric constant than titania over a range of wavelengths and frequencies. The ability to fine tune the properties is explored.

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