Structural analysis of hydrogenated diamond-like carbon films from electron energy loss spectroscopy
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John C. Angus Department of Chemical Engineering, Case Western Reserve University, Cleveland, Ohio 44106 (Received 10 April 1990; accepted 25 July 1990) Electron energy loss spectral analysis of the TT and (TT + a) electron plasma resonances are used to analyze the structure of hydrogenated diamond-like carbon (a-C: H) films. Energy loss peaks associated with the resonances of the v and (TT +
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