Study on Estimation Method for Maximum Temperature of Multi-layered Micro-probe by Joule-Heating
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International Journal of Precision Engineering and Manufacturing https://doi.org/10.1007/s12541-020-00392-y
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Study on Estimation Method for Maximum Temperature of Multi‑layered Micro‑probe by Joule‑Heating Hyun‑Woo Jung1 · Yun‑Jae Kim1 · Jun‑Hyub Park2 Received: 10 February 2020 / Revised: 29 June 2020 / Accepted: 22 July 2020 © Korean Society for Precision Engineering 2020
Abstract In this study, a method which would improve reliability of coated vertical type micro-probe under Joule heating is described. The method is to decouple the mechanical and electrical characteristics of a probe. That is, the method is to coat a metal with good electrical characteristics on a core metal with a good mechanical characteristics by electroplating. For various configurations of cross-sectional area of probe, FE analysis are performed, and a fabricated vertical micro-probe is tested to improve the accuracy of FE analysis. By increasing the coating thickness of a metal (gold, Au) with good electrical characteristics by electroplating while keeping a total cross-sectional area of a probe constant, the maximum temperature of probe continues to decrease as the cross-sectional area of core metal (nickel, Ni) with the good mechanical characteristics is reduced. A simple formula to predict the maximum temperature of probe depending on the coating thickness based on the results of FE analysis is proposed. The formula describe that the maximum temperature of the probe by Joule heating is a function of the ratio of the conductivity of the coating metal to the core metal and the ratio of the cross-sectional area of the coating metal to the total cross-sectional area of the probe. Keywords Vertical micro-probe · Multi-layered micro-structure · Joule heating · Reliability · Current carrying capacity List of Symbols Q̇ Joule Joule heat generation rate Q̇ cond Conductive heat transfer rate Q̇ conv Convective heat transfer rate I Electrical current R Total electrical resistance of the probe Rcoating Resistance of coating Rcore Resistance of core 𝜌 Electrical resistivity 𝜌coating Electrical resistivity of coating 𝜌core Electrical resistivity of core A Total cross-sectional area Acoating Cross-sectional area of coating Acore Cross-sectional area of core lc Characteristic length of the probe r Area fraction of coating * Jun‑Hyub Park [email protected] 1
Department of Mechanical Engineering, Korea University, 145, Anam‑ro, Sungbuk‑Ku, Seoul 02841, Republic of Korea
Department of Mechanical and Automotive Engineering, Kyungsung University, 309, Suyeong‑ro, Nam‑gu, Busan 48434, Republic of Korea
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k Thermal conductivity kcoating Thermal conductivity of coating kcore Thermal conductivity of core T0 Temperature of the upper and lower ends of probe Tmax Maximum temperature of probe λ Ratio of thermal conductivity of core to that of coating C∗ Calibration parameter for maximum temperature estimation equation
1 Introduction A probe card is a device that detects whether an electronic device such as a semico
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