Study on temperature influence of an electrothermally excited MEMS resonant sensor based on finite element method
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TECHNICAL PAPER
Study on temperature influence of an electrothermally excited MEMS resonant sensor based on finite element method Huichao Shi1 • Guojun Zhu1 • Le Cao2 • Shangchun Fan3 Received: 10 August 2020 / Accepted: 10 October 2020 Ó Springer-Verlag GmbH Germany, part of Springer Nature 2020
Abstract The temperature influence is one of the main factors affecting the accuracy improvement of the MEMS resonant sensor. For the electrothermally excited MEMS resonant sensor, temperature influence not only comes from the inherent thermal temperature rise, but also depends on the change of ambient temperature. However, due to the complex structure, different material properties and size error of the sensor, it is difficult to establish the theoretical model of temperature influence to provide reference for the material selection and optimization design of structural parameter for the sensor. For the electrothermally excited MEMS resonant sensor, finite element method (FEM) is used to establish the model of temperature influence and study the influence of ambient temperature and the inherent thermal temperature rise. Experiment platform was built, and the influence experiment of the inherent thermal temperature rise and the ambient temperature was conducted to verify the results of FEM simulation. And the FEM simulation results and experiment results are in good agreement. The FEM simulation and the results obtained by this method could provide an important reference for material selection and structural parameter optimization design of the electrothermally excited MEMS resonant sensor.
1 Introduction At present, MEMS resonant sensor are widely used (Li et al. 2012; Wang 2013) and shows outstanding performances such as small volume, high accuracy, good stability and negligible hysteresis (Greenwood 1984; Kyoichi et al. 1990; Tang et al. 2011). Temperature is an important parameter affecting the accuracy of sensors, and the output of MEMS resonant sensor is also inevitably affected by the temperature (Tang et al. 2011). Because of easing fabrication, the electrothermal excitation is often used to excite MEMS resonator (Wdfinger RJ et al. 1968). For electrothermally excited MEMS resonant sensor, temperature change inevitably cause frequency offset and thermal phase shift of the vibration signal (Shi et al. 2015).The main causes of temperature change are the & Huichao Shi [email protected] 1
College of Information Science and Technology, Beijing University of Chemical Technology, Beijing 100029, China
2
School of Electric and Electronic Engineering, Shanghai University of Engineering Science, Shanghai 201620, China
3
School of Instrument Science and Opto-Electronics Engineering, Beihang University, Beijing 100191, China
ambient temperature change and the inherent thermal temperature rise. The inherent thermal temperature rise is caused by electrothermal excitation, which is difficult to avoid. And it is also difficult to keep the ambient temperature constant when the
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