Study on the transient response to the point-to-point motion controls on a dual-axes air-bearing planar stage
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ORIGINAL ARTICLE
Study on the transient response to the point-to-point motion controls on a dual-axes air-bearing planar stage Fan-Chun Kuo 1 & Chekang Hsu 1 & Meng-Ru Hsieh 1 & Jia-Yush Yen 1 Fu-Cheng Wang 1
&
Liang-Chia Chen 1 & Tien-Tung Chung 1 &
Received: 18 June 2020 / Accepted: 19 October 2020 # Springer-Verlag London Ltd., part of Springer Nature 2020
Abstract This note addresses the transient behavior of the different point-to-point motion control strategies. The transition between the high-speed velocity control and the high-precision position feedback often leads to undesirable overshoot and residual oscillation. This study first introduces the use of an integrated H∞-chain scattering description (CSD) synthesized controller for a unified point-to-point motion to a high-precision positioning control without switching. This study then compares the control effects with the s-curve trajectory control and an augmented Luenberger observer (ALO)-based control. The s-curve control is a positiondependent implementation and has to be converted into a time-domain trajectory for practical implementation. It is desirable to examine if the trajectory error would accumulate into a large overshoot. The ALO uses an auxiliary system to suppress the thrust ripple but is slower compared with the acceleration-based H∞-CSD and s-curve control. It is interesting to see that the H∞-CSD controller automatically reaches a similar performance as the s-curve trajectory. Both the s-curve and the H∞-CSD control algorithms achieve access time in the range of 200 ms for a 10-mm travel. It is also interesting to notice that the time-domain error for the s-curve trajectory does not accumulate, and the overshoot is < 0.08%. As a comparison, the access time for the integrated H∞-CSD controller is 195 ms with an overshoot of 0.097%, and the access time for the s-curve trajectory control is 212 ms with an overshoot of 0.016%. Keywords Air-bearing planar stage . PMLSM . Point-to-point motion control . S-curve
1 Introduction The precision high-speed point-to-point motion depends on (1) the capacity of the motor to generate the required thrust, (2) the ability of the driver to respond to the fast command change, (3) the resolution of the sensor for measurement, and (4) the mechanical design to allow for frictionless and backlash-free movement. The control algorithm merely needs to drive the system to its maximum capacity. Current commercial precision stages reached 0.1 μm resolution, 200 mm/s speed, with a travel range of 200 mm [1, 2]. The combined specifications nearly reached the optimum sensor-actuator capacities and have surpassed the performance in the current
* Jia-Yush Yen [email protected] 1
Department of Mechanical Engineering, National Taiwan University, Taiwan, Republic of China
literature. With the positioning and the fast-moving performances reaching the limit, what becomes interesting is the transient behavior of the stage when reaching the target. The continued industrial demand for faster and more precise motion stages
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