Surface-interface micro-structures and mechanical properties of chemical vapor deposited diamond films

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Zhang Ling School of Mechanical Engineering, Changzhou University, Changzhou 213164, China (Received 14 March 2016; accepted 8 August 2016)

A diamond ﬁlm was deposited on YT14 cemented carbide cutting tools with a chemical vapor deposition, the surface-interface morphologies, compositions of chemical elements, phases, atomic bonding energies, and structures of the ﬁlms were analyzed with a scanning electron microscopy, energy dispersive spectrometer, x-ray diffraction, x-ray photoelectron spectroscopy, and Raman, respectively, and the mechanical properties of the ﬁlm were characterized with a nanoindentation and scratch test, respectively. The results show that the surface of diamond ﬁlm is continuous and dense, the surface roughness of the ﬁlm is 79.2 nm, and the average grain size is 478.2 nm. The atomic binding energies of C1s are composed of sp2 at the Raman shift of 1363.01 cm1 and sp3 at the Raman shift of 1556.26 cm1. The hardness and equivalent elastic modulus of the ﬁlm is 16.27397 GPa and 166.1791 GPa, respectively, and the binding strength of the ﬁlm-substrate is 26.2 N, showing a high anti-scratch ability.

I. INTRODUCTION

Diamond ﬁlms are regarded as a kind of ideal material for cutting tool ﬁlms in modern industry for its unique characteristics, such as high hardness, high equivalent elastic modulus, good thermal conductivity, good chemical durability, low friction and thermal expansion coefﬁcient, high corrosion resistance, and so on.1–3 Many experiments and operations reveal that the diamond ﬁlms can improve service life of cutting tools and machining precision effectively.4 So the diamond ﬁlms are always used for processing intractable materials, such as superhard material, nonferrous metal, nonmetallic material, composite material etc., which make them credit for extensive using.5 People have made much development and achievements on depositing the diamond ﬁlms by now, there are mainly two ways, i.e., physical vaporous deposition6 and chemical vaporous deposition (CVD).7,8 CVD has great application prospect in surface modiﬁcation treatment of cemented carbides,9 which is suitable for the substrates with all shapes. Therefore, the diamond ﬁlm is always considered to improve service life of cutting tools and machining quality.10 In the past decades, CVD technology has made great effect on the development of industry.11,12 In this study, the surface-interface morphologies and compositions of chemical elements of diamond ﬁlms on Contributing Editor: Mauricio Terrones a) Address all correspondence to this author. e-mail: [email protected] DOI: 10.1557/jmr.2016.310

YT14 cemented carbide cutting tools were investigated with a scanning electron microscopy (SEM), and its conﬁgured energy dispersive spectrometer, respectively. The phases, atomic bonding energies, and structures of the ﬁlm were determined with an x-ray diffraction (XRD), x-ray photoelectron spectroscopy (XPS), and Raman, respectively, and the surface roughness was analyzed by atomic force microscopy (AFM). Nano indenter was the measureme

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