Surface-interface micro-structures and mechanical properties of chemical vapor deposited diamond films

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Zhang Ling School of Mechanical Engineering, Changzhou University, Changzhou 213164, China (Received 14 March 2016; accepted 8 August 2016)

A diamond film was deposited on YT14 cemented carbide cutting tools with a chemical vapor deposition, the surface-interface morphologies, compositions of chemical elements, phases, atomic bonding energies, and structures of the films were analyzed with a scanning electron microscopy, energy dispersive spectrometer, x-ray diffraction, x-ray photoelectron spectroscopy, and Raman, respectively, and the mechanical properties of the film were characterized with a nanoindentation and scratch test, respectively. The results show that the surface of diamond film is continuous and dense, the surface roughness of the film is 79.2 nm, and the average grain size is 478.2 nm. The atomic binding energies of C1s are composed of sp2 at the Raman shift of 1363.01 cm1 and sp3 at the Raman shift of 1556.26 cm1. The hardness and equivalent elastic modulus of the film is 16.27397 GPa and 166.1791 GPa, respectively, and the binding strength of the film-substrate is 26.2 N, showing a high anti-scratch ability.

I. INTRODUCTION

Diamond films are regarded as a kind of ideal material for cutting tool films in modern industry for its unique characteristics, such as high hardness, high equivalent elastic modulus, good thermal conductivity, good chemical durability, low friction and thermal expansion coefficient, high corrosion resistance, and so on.1–3 Many experiments and operations reveal that the diamond films can improve service life of cutting tools and machining precision effectively.4 So the diamond films are always used for processing intractable materials, such as superhard material, nonferrous metal, nonmetallic material, composite material etc., which make them credit for extensive using.5 People have made much development and achievements on depositing the diamond films by now, there are mainly two ways, i.e., physical vaporous deposition6 and chemical vaporous deposition (CVD).7,8 CVD has great application prospect in surface modification treatment of cemented carbides,9 which is suitable for the substrates with all shapes. Therefore, the diamond film is always considered to improve service life of cutting tools and machining quality.10 In the past decades, CVD technology has made great effect on the development of industry.11,12 In this study, the surface-interface morphologies and compositions of chemical elements of diamond films on Contributing Editor: Mauricio Terrones a) Address all correspondence to this author. e-mail: [email protected] DOI: 10.1557/jmr.2016.310

YT14 cemented carbide cutting tools were investigated with a scanning electron microscopy (SEM), and its configured energy dispersive spectrometer, respectively. The phases, atomic bonding energies, and structures of the film were determined with an x-ray diffraction (XRD), x-ray photoelectron spectroscopy (XPS), and Raman, respectively, and the surface roughness was analyzed by atomic force microscopy (AFM). Nano indenter was the measureme