Temporal Pulse Shaping and Optimization in Ultrafast Laser Ablation of Materials
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Temporal Pulse Shaping and Optimization in Ultrafast Laser Ablation of Materials R. Stoian1, S. Winkler1, M. Hildebrand1, M. Boyle1, A. Thoss1, M. Spyridaki2, E. Koudoumas2, N.M. Bulgakova3, A. Rosenfeld1, P. Tzanetakis2, C. Fotakis2, and I.V. Hertel1 1
Max-Born-Institut für Nichtlineare Optik und Kurzzeitspektroskopie, Max-Born Strasse 2a, 12489 Berlin, Germany 2 Institute of Electronic Structure and Laser, Foundation for Research and Technology-Hellas, P.O. Box 1527, 71110 Heraklion, Crete, Greece 3 Institute of Thermophysics SB RAS, 1 Acad. Lavrentyev Avenue, 630090 Novosibirsk, Russia ABSTRACT: The possibility of phase manipulation and temporal tailoring of ultrashort laser pulses enables new opportunities for optimal processing of materials. Phase-manipulated ultrafast laser pulses allow adapting the laser energy delivery rate to the material properties for optimal processing laying the groundwork for adaptive optimization in materials structuring. Different materials respond with specific reaction pathways to the sudden energy input depending on the efficiency of electron generation and on the ability to release the energy into the lattice. The sequential energy delivery with judiciously chosen pulse trains may induce softening of the material during the initial steps of excitation and change the energy coupling for the subsequent steps. We show that this can result in lower stress, cleaner structures, and allow for a materialdependent optimization process. INTRODUCTION Ultrafast lasers are powerful tools to process different materials on and below the scale of optical wavelengths. Their potential is based on the prospect of strong localization of the energy, increased controllability, accuracy, and reduced residual damage, fulfilling already strong demands for increased miniaturization and integration in reliable micro and nano fabrication techniques. Ultrafast lasers offer unparalleled capabilities for reduced-scale processing, taking advantage of the strong nonlinear and selective, non-thermally driven interactions, reduced heat effects, and, more recently, the unique possibility of pulse adaptive manipulation [1-6]. The extreme irradiation conditions generated by ultrashort laser pulses have also allowed previously unexplored properties of materials around critical points to be generated. Ultrafast laser-driven phase transitions [7] and exotic metastable states are some of the observations that point towards novel properties and the potential of obtaining singular laser machining technologies suitable for a broad range of existing or emerging applications. These novel techniques are conceived to generate new matter properties and phases based on synergies with material intrinsic response, introducing thus new challenges for fully controlled optimal processing procedures and unfolding new perspectives for “intelligent”, feedback-assisted processing of materials. Parallel to the extensive progress in ultrafast laser technologies, the interest in studying the fundamental aspects of the interaction of
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