The effect of Pt x Pb intermetallic metastable phase on the crystal orientation in PZT thin films
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The effect of PtxPb intermetallic metastable phase on the crystal orientation in PZT thin films Mi Xiao1 · Weikang Zhang1 · Zebin Zhang1 · Ping Zhang1 Received: 14 December 2017 / Accepted: 10 April 2018 © Springer Science+Business Media, LLC, part of Springer Nature 2018
Abstract In this paper, the crystal orientations of Pb(Zr0.52Ti0.48)O3 (PZT) thin films prepared by sol–gel method were investigated by using various initial annealing temperature in the modified annealing process. The films were put directly into the muffle furnace when the temperature reached at 300–500 °C, it’s clear that this modified annealing process made the PZT films presented better (111)-orientation. A PtxPb intermetallic metastable phase was observed by X-ray diffraction, which is considered to be connected with the promotion of the (111) preferred orientation. The PZT thin film with 400 °C initial annealing temperature has the maximum (111) diffraction intensity, remanent polarization and dielectric constant.
1 Introduction Pb(Zr0.52Ti0.48)O3 (PZT) thin films have been of great interest for many years for their ferroelectric, pyroelectric, and piezoelectric properties to be applied to ferroelectric random access memory, infrared sensor, energy harvesting and micro actuator for MEMS [1–3]. Among several fabrication methods, sol–gel process has the advantage of better stoichiometry, simplicity and low cost [4–6]. It is necessary to carefully control the processing conditions during preparation to obtain the preferred orientated PZT films, because the randomly oriented PZT films present larger energy loss and poor electrical properties [7]. In this paper, sol–gel method with a modified annealing process was used to obtain highly preferred oriented PZT thin films. In our previous work [8], crake-free PZT thin films were fabricated using sol–gel method on Pt/Ti/SiO2/Si substrates. Highly (111)-oriented and well-crystallized perovskite phase was obtained, but the formation mechanism was not fully understood. The nucleation and growth of the perovskite phase is vitally important to the optimization of crystal orientations. There were some researches on crystal orientations of PZT films [9–11]. Han et al. [9] found that the * Mi Xiao [email protected] 1
School of Electronic and Information Engineering and Key Laboratory of Advanced Ceramics and Machining Technology of Ministry of Education, Tianjin University, Tianjin 300072, People’s Republic of China
(111)-oriented initial crystallites directly formed on the top of Pt in the early stage of crystallization, which reduced the effective activation energy and promoted the formation of (111)-oriented perovskite phase. Zeng et al. [10] described that PbTiO3 seed layer between the platinum bottom electrode and the PZT films could promote formation of (100) perovskite phase due to the presence of sufficient nucleation sites. Wang et al. [11] have studied that intermetallic metastable PtxPb phase was observed by X-ray diffraction, and it is found that the position of this peak shifted fr
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