The role of substrate temperature on the performance of humidity sensors manufactured from cerium oxide thin films
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The role of substrate temperature on the performance of humidity sensors manufactured from cerium oxide thin films Hamed A. Gatea1,2,* 1 2
Directorate Education of Dhi-Qar, Nasiriyah, Iraq Al Alyen University- College of Health and Medical Technologies, Dhi-Qar, Nasiriyah, Iraq
Received: 5 August 2020
ABSTRACT
Accepted: 18 October 2020
Cerium oxide (CeO2) thin films as humidity sensors are obtained by pulsed laser deposition (PLD) grown on Si (100) substrate. CeO2 nanoparticles were taken as target materials for PLD technique. The effect of film deposition condition, such as deposition temperature on performance sensor, was explored. The substrate temperature ranges varied from 300 to 700 °C. The structural and surface morphologies were examined by X-ray diffractometer (XRD) and scanning electronic microscopy (SEM), respectively. The capacitance and resistance of the sensors were tested. The sensor utilizing CeO2 films exhibited high sensitivity, and the increase in humidity led to a gradual increase in sensitivity and decreased resistance. The sensor performance is highly dependent on morphology and surface, which in turn is affected by the change in electrical properties of the film.
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Springer Science+Business
Media, LLC, part of Springer Nature 2020
1 Introduction In recent decades, demands on physical and chemical sensors have increased remarkably due to the latest developments in automated systems [1]. Humidity is an extremely popular component in our environment that is no longer controlled or measured for comfort, but because of the broad spectrum in technology and industries [2]. ‘‘The humidity sensor is an electronic device that converts the adsorbed water vapour into an electronic single. Electronic type humidity sensor is mainly based on the capacitive change and resistive change’’ [3].
Among the different types of humidity sensors, those that primarily rely on electrical properties (resistance or impedance and capacitance) are usually acceptable for use in modern automatic systems [4]. It is recognized that a humidity sensor must satisfy the requirements to fulfil a wide range of advanced applications: simple structure, resistance to contaminates, sturdiness, fitness to circuitry, low cost, and high sensitivity in a wide range of humidity levels [5]. The operation, response time, and sensitivity range of a humidity sensor are crucial in deciding its appropriate applications. The morphology, pore
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https://doi.org/10.1007/s10854-020-04714-8
J Mater Sci: Mater Electron
dimension distribution, area, and porosity determine the humidity sensor performance [6]. The dominant substances used in manufacturing humidity sensors are ceramics, polymer composites, organic/inorganic composites, natural compounds, and semiconductors [7], as shown in Table 1. Among several categories, metals and ceramic oxides are observed to be desirable as humidity sensing substances for their unique properties [9], as shown in Table 2. M
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