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Thin Epitaxial Silicon Foils Using Porous-Silicon-Based Lift-Off for Photovoltaic Application Twan Bearda, Ivan Gordon, Hariharsudan Sivaramakrishnan Radhakrishnan, Valérie Depauw, Kris Van Nieuwenhuysen, Menglei Xu, Loic Tous, Miha Filipič, Shashi Kiran Jonnak, Alireza Hajijafarassar, Xingyu Liu, Maarten Debucquoy, Yaser Abdulraheem, Jozef Szlufcik and Jef Poortmans MRS Advances / FirstView Article / July 2016, pp 1 - 12 DOI: 10.1557/adv.2016.314, Published online: 10 May 2016

Link to this article: http://journals.cambridge.org/abstract_S2059852116003145 How to cite this article: Twan Bearda, Ivan Gordon, Hariharsudan Sivaramakrishnan Radhakrishnan, Valérie Depauw, Kris Van Nieuwenhuysen, Menglei Xu, Loic Tous, Miha Filipič, Shashi Kiran Jonnak, Alireza Hajijafarassar, Xingyu Liu, Maarten Debucquoy, Yaser Abdulraheem, Jozef Szlufcik and Jef Poortmans Thin Epitaxial Silicon Foils Using Porous-Silicon-Based Lift-Off for Photovoltaic Application. MRS Advances, Available on CJO 2016 doi:10.1557/adv.2016.314 Request Permissions : Click here

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MRS Advances © 2016 Materials Research Society DOI: 10.1557/adv.2016.314

Thin Epitaxial Silicon Foils Using Porous-Silicon-Based Lift-Off for Photovoltaic Application Twan Bearda1, Ivan Gordon1, Hariharsudan Sivaramakrishnan Radhakrishnan1, Valérie Depauw1, Kris Van Nieuwenhuysen1, Menglei Xu1,2, Loic Tous1, Miha Filipič1, Shashi Kiran Jonnak1,2,3, Alireza Hajijafarassar1,2,4, Xingyu Liu1,2,5, Maarten Debucquoy1, Yaser Abdulraheem6, Jozef Szlufcik1, Jef Poortmans1,2,7 1

IMEC, Kapeldreef 75, 3001 Heverlee, Belgium Department of Electrical Engineering (ESAT), KU Leuven, Kasteelpark Arenberg 10, 3001 Heverlee, Belgium 3 University of Freiburg, Hermann-Herder-Straße 5, 79104 Freiburg, Germany 4 Politecnico di Milano, Dip. Chimica, Materiali e Ing. Chimica Giulio Natta, 20133 Milan, Italy 5 Technical University of Dresden, Helmholtzstraße 10, 01069 Dresden, Germany 6 Electrical Engineering Department, College of Engineering & Petroleum, Kuwait University, P.O. Box 5969, 13060 Safat, Kuwait 7 Institute for Material Research (IMO), Hasselt University, Wetenschapspark 1, 3590 Diepenbeek, Belgium 2

ABSTRACT In order to reduce the material cost for silicon solar cells, several research groups are investigating methods to minimize the silicon consumption for making monocrystalline silicon wafers. One promising approach is deposition of an epitaxial layer on porous silicon, followed by detachment of the layer. This contribution discusses improvements in the epitaxial wafer fabrication by optimization of the porosification process. The introduction of a layered porous silicon structure allows to independently improve both epitaxial layer quality and detachment yield. In this way, we have managed to obtain 100µm thick silicon wafers with effective lifetimes up to 1.3ms, and 40µm