Thin Film Processing for High-Tc Superconductors of Bi-System
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THIN FILM PROCESSING FOR HIGH-Tc SUPERCONDUCTORS OF BI-SYSTEM K.WASA,
H.ADACHI,
K.HIROCHI,
Y.ICHIKAWA AND K.SETSUNE.
Central Res. Labs. Matsushita Elec. Moriguchi, Osaka 570, JAPAN
Co.
Ltd.
ABSTRACT Basic thin film deposition processes for the high-Tc superconductors of Bi-systems are described. There appear several superconducting phases including the low-Tc phase Bi Sr 2 Ca Cu 0 and the high-Tc phase Bi 2 Sr 2 Ca Cu O. Thin firms with tese superconducting phases are synthe'sized by a selection of the substrate temperature Ts during the deposition : the high-Tc phase with Tc=100K is synthesized at Ts>800 °C; the low-Tc phase with Tc=80K, at Ts
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