Towards Synthesis of Micro-/Nano-systems The 11th International Conf
At the beginning of the 21st century, manufacturing industry is faced with new challenges stemming from globalization and the need for environmental sustainability. The progress of micro-/nano technology means that precision engineering is now considered
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Fumihiko Kimura and Kenichiro Horio (Eds.)
Towards Synthesis of Micro-/Nano-systems The 11th International Conference on Precision Engineering (ICPE) August 16–18, 2006, Tokyo, Japan Organized by JSPE (Japan Society for Precision Engineering) Co-organized by ASPE (American Society for Precision Engineering), euspen (European Society for Precision Engineering and Nanotechnology) JSPE Publication Series No.5
With 641 Figures
123
Fumihiko Kimura, Dr. Eng. Department of Precision Machinery Engineering School of Engineering The University of Tokyo Tokyo 113-8656 Japan
Kenichiro Horio, Dr. Eng. Mechanical Engineering Department School of Engineering Saitama University Saitama 338-8570 Japan
British Library Cataloguing in Publication Data International Conference on Production/Precision Engineering (11th : 2006 : Tokyo, Japan) Towards synthesis of micro-/nano-systems : proceedings of the 11th International Conference on Precision Engineering 1.Production engineering - Congresses 2.Microtechnology Congresses 3.Nanotechnology - Congresses I.Title II.Kimura, F. (Fumihiko), 1945- III.Horio, Kenichiro 620’.0045 ISBN-13: 9781846285585 ISBN-10: 1846285585 Library of Congress Control Number: 2006929601 ISBN-10: 1-84628-558-5 ISBN-13: 978-1-84628-558-5
e-ISBN 1-84628-559-3
Printed on acid-free paper
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Preface production engineering, and to discuss the advanced technologies of the related fields. This proceedings book of the Conference includes 3 keynote papers and 71 contributed papers, which consist of 52 full papers and 19 short papers. Keynote papers address important topics in the f
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