Use of A New High Speed Acrylate Deposition Process to Make Novel Multilayer Structures
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ABSTRACT A new process has been developed to deposit acrylate thin films at speeds of 1500 ft/minute or higher. These films range in thickness from a few hundred Angstroms to a few microns and are uniform in thickness to within 5%. They can vary in refractive index from 1.35 to 1.60 and have mechanical properties from very hard and abrasion resistant to very soft and flexible. The acrylate deposition process was originally developed for multilayer acrylate/aluminum capacitors where over 10,000 layer The process is compatible with other structures were produced[l]. vapor deposition processes such as sputtering, evaporation, and CVD. Both processes can take place at the same time in the same vacuum chamber to produce various multilayer structures. This paper will discuss some of the features of this process and the associated equipment. It will present examples of the wide range of acrylate/acrylate, acrylate/metal, and acrylate/inorganic It will discuss various material structures that can be made. applications for these structures. INTRODUCTION There are many processes for coating substrates with organic coatings such as roller coating, spin coating, vapor deposition of parylene coatings, CVD coating, plasma polymerization, and spray These processes deposit organic blends containing coating. solvents as a diluent or 100% solids blends of monomers and oligomers. The vapor deposition processes, parylene coating, CVD coating, and plasma polymerization, deposit molecular vapors which The coatings are activated either prior to or during deposition. deposited by roller, spin, or spray coating processes are cured by heat or UV or electron beam irradiation after deposition. A new process has been developed to vapor deposit and cure This process involves a three step acrylate monomer materials[2]. evaporation process, condensation of the acrylate monomer on the substrate as a liquid thin film, and curing the liquid thin film This process monomer to form a hard cross-linked polymeric film. has been used experimentally for over 14 years for capacitor and It is now in the process of film and paper coating applications. being introduced commercially for a variety of applications. These coatings are generally deposited in thicknesses from about 200 They have been deposited Angstroms to about 2 microns per layer. on flexible sheet substrates as well as three dimensional parts. This process has been described previously for use in coating polymer films to achieve high oxygen and water barriers[3], release multilayer and paper sheets[4], and coatings for film capacitors[2]. 77 Mat. Res. Soc. Symp. Proc. Vol. 382 01995 Materials Research Society
This paper will discuss various aspects of the materials, process, and equipment that are used to deposit these acrylate It is interesting to note that this process and coatings. equipment can be adapted to deposit almost any organic fluid or solid that has a molecular weight below about 1000 whether they The advantage of this process involve acrylate materials or not.
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