What Can Lasers Do in the Nano-Fabrication of Carbon Nanotube Based Devices?
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What Can Lasers Do in the Nano-Fabrication of Carbon Nanotube Based Devices? Yun Shen Zhou, Wei Xiong, Masoud Mahjouri-Samani, Yang Gao, Matt Mitchell, and Yong Feng Lu1 Department of Electrical Engineering, University of Nebraska-Lincoln, Lincoln, NE, 68588-0511, U.S.A. ABSTRACT Numerous applications based on CNTs have been conceived and developed at laboratory scale. However, only a handful of applications have been successfully implemented due to the difficulties in controlled growth, manipulation, and integration of CNTs. In spite of countless efforts having been devoted into this field, high-performance-on-demand solution packages are still absent. In this study, we investigated applications of lasers in the controlled growth and integration of CNTs, and developed laser-based strategies to achieve nano-fabrication of CNTbased devices. By making use of unique features of lasers, we achieved 1) parallel integration of CNTs into pre-designed micro/nano-architectures in a single-step laser-assisted chemical vapor deposition (LCVD) process, 2) selective removal of metallic CNTs in open air, 3) growing CNTs of controlled-alignments, and 4) diameter modulation in individual CNTs. The laser-based strategies developed in this study suggest a laser-based solution-package to meet the challenges for the nano-fabrication of CNT-based devices and promises a reliable and scalable approach to achieve CNT-integrated devices. INTRODUCTION Carbon nanotubes (CNTs) belong to a family of one-dimensional (1D) cylindrical carbon molecules demonstrating a rich diversity of chiral structures and remarkable properties. Enchanted by their intrinsic 1D structure and extraordinary properties, tremendous efforts have been devoted to the investigations of CNTs [1-3]. A wide spectrum of CNT-based applications has been conceived and investigated [1-3]. CNTs have been envisioned as one of the most promising candidates for fabricating nano-electronics, optics, opto-electronics, etc [4,5]. To achieve full potentials of CNTs, successful implementation of CNTs has to be accomplished. Extensive investigations have been made in fabricating CNT-based components and devices, such as transistors, logic gates, interconnects, sensors and detectors [1-5]. However, successful implementation of CNT-based devices is yet far from reality due to several critical challenges, including precise integration, stable wiring, alignment direction, and electrical type. Ideally, it is desired that CNTs of determined electrical types were precisely wired between pre-designed electrodes with stable contacts for device fabrication [6]. However, such precise control is extremely difficult due to the ultra-tiny size of CNTs, high-resolution nanoscale positioning, and subtle structure diversity. Extensive investigations have been carried to address the challenges. To achieve controlled manipulation and integration of CNTs, scanning-probe-microscopeassisted patterning, template-directed assembly, and dielectrophoresis deposition have been developed [7-10]. Monodispersed CNTs of
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