X-Ray Nanoplasma Instruments and Tools
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Q5.16.1
X-Ray Nanoplasma Instruments and Tools Scott Bloom, Harry Rieger, and Jim Alwan JMAR Research Division 3956 Sorrento Valley Road San Diego, CA 92121 www.jmar.com ABSTRACT Soft x-rays have wavelengths in the range of 1-15 nm and therefore the diffraction limited spot size of focused x-rays can be as small as 1.22 x the radiation wavelength, or less than 20 nm spot size. Using our pulsed x-ray source and focusing a small collected solid angle of this x-ray radiation to a sample provides enough power to form a very hot plasma that emits a range of radiation from UV through IR that can be collected and analyzed on a conventional optical spectrometer. In addition to diagnostic capabilities the instrument can be also used as a tool to form structures at nanometer scale resolution. Since the plasma is formed by ablating the target material with x-rays the target can be patterned or nanomachined using the plasma itself. It should be possible to pattern nanoscale devices by rastering the material under the nanoplasma. Finally in analogy to plasma assisted CVD processes, organometallic vapors could introduced into the sample chamber such that the nanoplasma locally plates out specific species of metals of other materials on the target at nanoscale sizes for forming devices, circuits, wires, etc. This paper presents a design for a nanoplasma instrument, predicted performance parameters will be presented, and development issues identified and discussed.
INTRODUCTION Nanoscale materials are currently being aggressively pursued by both military and non-military R&D groups. In order to develop such materials, diagnostic techniques capable of producing accurate, sensitive, chemical analysis on the spatial scale of the nanomaterial itself are required. There are currently many materials analysis techniques available to look at surfaces and interfaces, most use a spectrometer looking at emitted radiation, emitted photoelectrons, or emitted ions from the material under analysis. While these techniques are quite reliable and sensitive they currently do not have the capability to sample materials, particularly in-situ, on the spatial scales required for nano technology.
Q5.16.2
1. Laser beam is used to form a laser produced plasma in a suitable target material, in this case carbon which has a strong line at 3.37nm 1J @ 532nm (150ps, 8 nm, Bragg multilayer coatings can be made fairly easily that have high reflectivity over large collection angles. For the shorter wavelengths only grazing incidence or diffractive optics are effective, these generally limit the collection optics to fairly high f number which in turn decreases collection efficiency. In this case the condenser can be a Wolter type optic, or a diffractive element such as a zone plate. Issues to be addressed in the proof of concept (POC) experiment include the focusing capabilities and efficiencies of a Wolter optic, and the requirements imposed by a zone plate optic (resolution, required bandwidth of incident radiation, and f number). For a longer wavelength syst
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