A Linear Inchworm Piezomotor with a New Configuration: Design Considerations, Fabrication and Characterization
- PDF / 1,765,012 Bytes
- 12 Pages / 595.276 x 790.866 pts Page_size
- 103 Downloads / 151 Views
RESEARCH PAPER
A Linear Inchworm Piezomotor with a New Configuration: Design Considerations, Fabrication and Characterization Mohammad Sangchap1,2 · Mohammad Tahmasebipour1,2,3 · Younes Tahmasebipour2 Received: 23 December 2019 / Accepted: 28 October 2020 © Shiraz University 2020
Abstract The new technologies of precise positioning systems with high speed and accuracy have been in the focus of attention in the recent years. In this research, a one-axis walker type inchworm piezomotor has been designed, modeled, manufactured and characterized. Simple design, simple manufacturing and assembly processes, low manufacturing cost and also high speed and stroke are advantages of this piezomotor. This system consists of three piezoelectric actuators, which installed into the clamps and feeder sets, and a guideway. The geometrical parameters with a high impact on the stiffness have been realized and modeled by the finite element method to ensure the proper functioning of the piezomotor. The motor dimensions are 55 × 23.1 × 15 mm3 which can provide a large movement range inside the guideway. The simulation analysis and experimental tests have been carried out to characterize the piezomotor. Based on the shape mode analysis, the maximum operating frequency of the piezomtor has been determined. Also, the Von-Mises stress analysis has been employed to predict the structural behavior of the motor. Finally, the experimental tests have been conducted to illustrate the piezomotor characteristics such as step pitch, speed, and operating frequency. Keywords Precision positioning system · Inchworm piezomotor · One-axis piezomotor · Piezoelectric motor · Piezoelectric actuator
1 Introduction In the recent years, nanopositioning systems and piezoelectric motors have been utilized extensively in some technological applications such as semiconductor devices manufacturing apparatus, biological sample manipulation, scanning probe microscopes (SPMs), optical instruments, alignment automation, and robotics. With the invention of the atomic force microscope and the scanning tunneling microscope, some significant advances have been made in the medical, chemical, material and physics sciences. One * Mohammad Tahmasebipour [email protected] 1
Faculty of New Sciences and Technologies, University of Tehran, Tehran, Iran
2
Micro/Nano‑Fabrication Technologies Laboratory, Faculty of New Sciences and Technologies, University of Tehran, Tehran, Iran
3
Micro/Nanofluidic Systems Laboratory, Faculty of New Sciences and Technologies, University of Tehran, Tehran, Iran
of the most widely used applications of the precise positioning systems is the scanning of the sample surface and control the interaction between the surface and the probe of the atomic force microscope. Since then, the scanning probe microscopes have been considered as a valuable tool to study and manipulate the objects (Tahmasebipour et al. 2009; Tahmasebipour et al. 2010; Fleming and Leang 2014; Ru et al. 2016). Precision positioning systems are used to move the o
Data Loading...
