A Semiconductor-based Field-effect Platform for (Bio-)Chemical and Physical sensors: From Capacitive EIS Sensors and LAP
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0952-F08-02
A Semiconductor-based Field-effect Platform for (Bio-)Chemical and Physical sensors: From Capacitive EIS Sensors and LAPS over ISFETs to Nano-scale Devices Michael J. Schöning1,2, Maryam H. Abouzar1,2, Torsten Wagner1,2, Niko Näther1, David Rolka2, Tatsuo Yoshinobu3, Joachim P. Kloock1,2, Monika Turek1,2, Sven Ingebrandt2, and Arshak Poghossian1,2 1 Laboratory for Chemical Sensors and Biosensors, Aachen University of Applied Sciences, Ginsterweg 1, Juelich, 52428, Germany 2 Institute of Bio- and Nanosystems, Research Centre Juelich, Juelich, 52425, Germany 3 Department of Electronic Engineering, Tohoku University, Sendai, 980-8579, Japan ABSTRACT The coupling of semiconductor field-effect devices (FED) together with chemical and biological recognition elements, like functional intelligent materials, biomolecules and living cells, represents an attractive platform for the creation of different (bio-)chemical sensors, multiparameter analysis systems and bio-chips. This paper summarises recent developments and current research activities in the field of (bio-)chemically modified FEDs, scaling down from capacitive EIS (electrolyte-insulator-semiconductor) sensors and LAPS (light-addressable potentiometric sensor) to ISFETs (ion-sensitive field-effect transistor) that have been realised in our laboratory. Selected examples of application of ISFETs for the detection of physical parameters in liquids are presented, too. With the aim of future development of nano-devices for the detection of single biomolecules, the possibility of a simple preparation of different selfaligned nano-structures by using conventional photolithography and pattern-size reduction technique has been experimentally demonstrated. INTRODUCTION Nowadays, semiconductor field-effect devices (FED) based on an electrolyte-insulatorsemiconductor system represent one of the key structural elements of a new generation of electronic chips for chemical and biological sensing with a direct electronic readout. These devices have been shown to be versatile tools for detecting pH, ion concentrations, enzymatic reactions, cellular metabolism and action potentials of living cells (see e.g., recent reviews [14]). More recently, researchers are highly interested in the coupling of charged macromolecules, like DNA (deoxyribonucleic acid), proteins and polyelectrolytes together with FEDs [5-15]. In addition, the possibility of detection of physical parameters in liquids with FEDs has been demonstrated [16,17]. Moreover, the inherent miniaturisation of FEDs and their compatibility with advanced microfabrication technology make them very attractive for the integration into microfluidic platforms and thus, for the creation of miniaturised analytical systems, like µTAS (micro total analysis system), „lab on chip“ and electronic tongue devices. The present paper summarises recent developments and current research activities in the field of FED-based (bio-)chemical and physical sensors as well as multi-parameter detection systems that have been realised. As transd
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