Adhesion Improvement of Polyimide/PDMS Interface by Polyimide Surface Modification
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Adhesion Improvement of Polyimide/PDMS Interface by Polyimide Surface Modication Shivani Joshi, Antonie van Loon, Angel Savov and Ronald Dekker MRS Advances / Volume 1 / Issue 01 / January 2016, pp 33 - 38 DOI: 10.1557/adv.2016.56, Published online: 26 January 2016
Link to this article: http://journals.cambridge.org/abstract_S2059852116000566 How to cite this article: Shivani Joshi, Antonie van Loon, Angel Savov and Ronald Dekker (2016). Adhesion Improvement of Polyimide/PDMS Interface by Polyimide Surface Modication. MRS Advances, 1, pp 33-38 doi:10.1557/adv.2016.56 Request Permissions : Click here
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MRS Advances © 2016 Materials Research Society DOI: 10.1557/adv.2016.56
Adhesion Improvement of Polyimide/PDMS Interface by Polyimide Surface Modification Shivani Joshi1, 2, Antonie van Loon 1, Angel Savov1,2, Ronald Dekker 1,2 1 Department of Microelectronics, TU Delft, Mekelweg 4, 2628 CD, Delft, The Netherlands 2 Philips Research Eindhoven, High Tech Campus 4, 5656AE, Eindhoven, The Netherlands ABSTRACT Silicon wafers coated with a 5μm thick layer of polyimide were treated with different surface modification techniques such as chemical adhesion promoters, oxygen plasma and an Ar+ sputter etch. After surface modification, the wafers were molded with a 1mm thick layer of PDMS. The adhesion of the PDMS was tested by peel testing and by using a Nordson DAGE wedge shear tester. It was found that commercially available chemical adhesion promoters and oxygen plasma treatment resulted in a very poor PI/PDMS adhesion, whereas the Ar+ sputter etch resulted in an adhesion so strong that the PDMS could not be delaminated from the PI surface without the failure of the material. INTRODUCTION The processing of polymeric materials is gaining importance, especially for the fabrication of flexible and stretchable medical micro- fabricated devices. Although a lot of study has been done on improving the adhesion between metal-polymer interfaces [1], the adhesion between different polymer materials is usually less understood, and therefore less controlled. In this paper we study the adhesion between polyimide and polydimethylsiloxane (PDMS) since these materials are frequently used in conformable medical devices and delamination of the polyimide-PDMS interface will result in the failure of the device. The non-toxic and inert nature of silicones makes them attractive in the area of medical devices. One such application that is gaining importance is the use of PDMS in ultrasound transducers for the purposes of imaging [2], monitoring [3] and therapy [4]. The silicone-PDMS is well known for its biocompatibility and compliance, and additionally it has an acoustic impedance that is matched to human tissue making it a good interface layer between the transducer and the body. Traditional ultrasound transducers are rigid and non
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