Ion beam modification of polyimide with linear ion source
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0908-OO14-07.1
Ion beam modification of polyimide with linear ion source Tetsuro Yamaguchi1, Shih Hsiu Hsiao 1, Yoshikazu Tanaka1, 2, and Ari Ide-Ektessabi1, 3 1
Graduate School of Engineering, Kyoto Universuty, Yoshidahonmachi, Sakyo-ku, Kyoto,
606-8501, Japan 2 Kyoto Thin-Film Materials Institute, Design and Development Center, Sanwa Kenma, Ltd., 56-1, Otake, Okubo-cho, Uji City, Kyoto, 611-0033, Japan 3
International Innovation Center, Kyoto Universuty, Yoshidahonmachi, Sakyo-ku, Kyoto,
606-8501, Japan ABSTRACT Polyimide films are widely used in various industrial fields. Some typical products are flexible printed circuits (FPCs), flexible displays, and electronic papers. Good adhesion between metal thin films and polyimide films is required for their long lifetime. Ion beam irradiation to the polyimide films modifies the chemical compositions, the chemical states, and the surface nanomorphology. These modifications are potential techniques to improve the adhesion. In this study, the authors employed a linear ion source, which is able to irradiate ion beam on large surfaces homogeneously. The linear ion source is desirable for industrial usage because of its high productivity. The aim of this work was to investigate the effect of modification using the linear ion source. The chemical states of the interface were characterized using x-ray photoelectron spectroscopy (XPS). The surface nanomorphology was investigated by atomic force microscopy (AFM). The performance of the modification system will be discussed, and the characteristics of the modified polyimide will be investigated in detail. INTRODUCTION Polyimide films have high electrical resistance, thermal stability and flexiblity. Therefore, polyimide films are important for electrical devices and are widely used as substrates of flexible printed circuits (FPCs) [1, 2]. In this application, metal films are deposited on the polyimide films. Good adhesion between the metal thin films and the polyimide films is required for long life time. The plasma treatment and the ion beam irradiation for the polyimide surface are potential techniques to achieve good adhesion. In these techniques, the ion bombardments modify the chemical compositions, the chemical states, and the nanomorphology of the
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polyimide surface for the adhesion improvement [3-5]. In order to apply the surface modification in an industrial scale, the large irradiation area is necessary. In this study, the authors employed a linear ion beam source modifications of the polyimide films because of its high productivity. The linear ion beam source has a race-track-shape extraction slit and can irradiate large surfaces homogeneously. Also, it is easy to enlarge the ion beam source in a longitudinal direction. The linear ion source is desirable for the industrial applications. In our previous papers, we investigated the linear ion source in detail, and the characteristics of linear ion source were reported [6, 7]. The object of this work was to investigate the effects of modification on
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