AlGaInN Quaternary Alloys by MOCVD

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AlGalnN Quaternary Alloys by MOCVD F.G. MCINTOSH*, E. PINER**, K. BOUTROS*, J.C. ROBERTS*, Y. HE**, M. MOUSSA***, N. EL-MASRY**, S.M. BEDAIR* *ECE Department, North Carolina State University, Raleigh, North Carolina 27695-7911. **MSE Department, North Carolina State University, Raleigh, North Carolina 27695-7916. ***Air Defense Academy, Alexandria, Egypt. ABSTRACT AlGaInN quaternary alloy based devices can cover the emission wavelength from deep UV to red. This Quaternary alloy also offers lattice matched heterostructures for both optical and microwave devices. We will report on the MOCVD growth of AIGa,_,_YInyN (0

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