Amorphous Carbon Nitride Films as a Candidate for Low Dielectric Constant Materials

  • PDF / 226,092 Bytes
  • 6 Pages / 420.48 x 639 pts Page_size
  • 41 Downloads / 205 Views

DOWNLOAD

REPORT


ABSTRACT We have succeeded to prepare high resistivity and rather low dielectric constant amorphous carbon nitride films a-CNx (0.52

Data Loading...