An error compensation method based on machine vision for laser-processing systems with galvanometers

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An error compensation method based on machine vision for laser‑processing systems with galvanometers Guangsheng Chen1 · Yi Zhang1 · Peiyun Tian1 Received: 4 December 2019 / Accepted: 13 November 2020 © Springer-Verlag GmbH Germany, part of Springer Nature 2020

Abstract Laser-processing system plays an important role in modern processing. To improve the precision of a galvanometer laserprocessing system, a novel compensation method based on machine vision is proposed. First, the various errors existing in the scanning process of the galvanometer system and the influence on the accuracy of the scanning system were analyzed. Second, processing a specific grid within the processing range of the laser-processing system, the machine vision method was employed to extract the skeleton image and obtain the sub-pixel coordinates of each grid corner point. By comparing them with their theoretical positions, the position and error of all corner points of the mesh were obtained. Finally, the position and error of the four corner points in the arbitrary grid region were analyzed by the weighted interpolation method, and the error value and compensation value of any point in the grid were derived, and an error compensation model was established to compensate the scanning system. To verify the effectiveness of the proposed compensation method, a compensation experiment was conducted, and the workpiece machining accuracy after compensation was improved. The method is simple in operation, offers good compensation effect, and has important theoretical significance and practical value for improving the precision of laser-processing systems.

1 Introduction As a current advanced processing method, laser processing has the advantages of fast processing speed and high processing precision. Galvanometer laser-machining systems are increasingly widely used and tend to replace traditional machining systems; however, during the scanning process in a galvanometer laser-processing system, there are various errors, which affect the accuracy of the galvanometerscanning system. In view of distortion of galvanometer laserscanning images, Zhao et al. [1] from Changchun University of Science and Technology, China proposed an algorithm with which to adjust the scanning angle by compensation of angle error through deducing pincushion distortion, thus compensating the scanning system. To compensate the image distortion phenomenon of the galvanometer-scanning system, Manakov et al. [2] proposed a novel mathematical Communicated by Dieter Meschede. * Guangsheng Chen [email protected] 1



School of Mechanical Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China

model to predict image distortion. Based on the mathematical model of the galvanometer-scanning system, a calibration procedure for estimating the position of the system (rotation and translation matrices) and its internal parameters determining its distortions be described, and then the geometric distortion introduced by system attributes was