Analytical modeling of mechanical behavior for MEMS/NEMS-based single-clamped multilayer resonators with symmetrical com
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TECHNICAL PAPER
Analytical modeling of mechanical behavior for MEMS/NEMS-based single-clamped multilayer resonators with symmetrical complex shapes Eustaquio Martı´nez-Cisneros1 • Luis A. Velosa-Moncada1 • Ernesto A. Elvira-Herna´ndez1 • Daniel Gonza´lez-Esparza2 • Luz Antonio Aguilera-Corte´s3 • Francisco Lo´pez-Huerta4 • Agustı´n L. Herrera-May1,2 Received: 24 July 2020 / Accepted: 3 September 2020 Springer-Verlag GmbH Germany, part of Springer Nature 2020
Abstract Several micro/nano-electromechanical systems (MEMS/NEMS) devices are composed by complex-shaped multilayer resonators such as energy harvesters, gas and biological sensors, magnetic field sensors, accelerometers, and viscosity sensors. These devices require analytical models to predict the best mechanical performance, improving their sensitivity and resolution. Here, we present the analytical modeling to determine the mechanical behavior of MEMS/NEMS-based single-clamped multilayer resonators with symmetrical complex shapes. This modeling can estimate the first bending resonant frequency and out-plane deflections of multilayer resonators using the Rayleigh and Macaulay methods, as well as the Euler–Bernoulli beam theory. In addition, the quality factors of these multilayer resonators are calculated considering the air damping at atmospheric pressure. Also, finite element method (FEM) models are developed to obtain the mechanical behavior of the resonators. The results of our analytical models agree well with those of FEM models and experimental data reported in the literature. The proposed analytical modeling can be used to enhance the mechanical response of MEMS/NEMS devices formed by multilayer resonators with symmetrical complex crosssections.
1 Introduction
Electronic supplementary material The online version of this article (https://doi.org/10.1007/s00542-020-05030-1) contains supplementary material, which is available to authorized users. & Agustı´n L. Herrera-May [email protected] 1
Micro and Nanotechnology Research Center, Universidad Veracruzana, Calzada Ruiz Cortines 455, 94294 Boca del Rı´o, Veracruz, Mexico
2
Maestrı´a en Ingenierı´a Aplicada, Facultad de Ingenierı´a de la Construccio´n y el Ha´bitat, Universidad Veracruzana, Calzada Ruiz Cortines 455, 94294 Boca del Rı´o, Veracruz, Mexico
3
Depto. Ingenierı´a Meca´nica, DICIS, Universidad de Guanajuato, Carretera Salamanca-Valle de Santiago km 3.5?1.8 km, Salamanca, 36885 Guanajuato, Mexico
4
Facultad de Ingenierı´a Ele´ctrica y Electro´nica, Universidad Veracruzana, Calzada Ruiz Cortines 455, 94294 Boca del Rı´o, Veracruz, Mexico
Resonant structures can improve the performance of several micro/nano-electromechanical systems (MEMS/ NEMS)-based devices. These resonant devices can have higher sensitivity and resolution, faster response, low cost fabrication, smaller sizes, and low power consumption. In addition, these devices can have compatibility with complementary metal-oxide-semiconductor (CMOS) technology (Jaber et al. 2019; Plat
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