Atom-by-atom fabrication by electron beam via induced phase transformations
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oduction A hallmark of the development of civilization is the organization of manufacturing and technology. Societies until the 18th century were largely dominated by small manufacturing by individual artisans and craftsmen, with a single person possessing the skills and experience for a full fabrication cycle. The early 20th century saw a transition to production line fabrication, with rigorously enforced standards and an increased focus on skillsets of individual workers. By the second half of the 20th century, the rapidly emerging trend was continuous automation and later robotization, giving rise to multibillion dollar large-volume industries. Today, the combination of emerging computer-guided design and three-dimensional (3D) printing technologies are enabling new types of fabrication based on individual designs, where high complexity structures can be fabricated at low cost and in small numbers. It is argued that a combination of 3D manufacturing and technologies underlying the “Internet of
things” can lay the foundation for a fourth industrial revolution.1 One of the most science-driven facets of this development is the “quantum industrial revolution,” which aims to fabricate reliable quantum information devices and necessitates atomicscale precision in manufacturing. Mainstream approaches to 3D manufacturing include actuator systems that spatially constrain the solidifying precursor (e.g., molten plastic). Alternatively, high-energy beams can be used to induce melting and aggregation in powder beds, or polymerization in liquid monomers. The full scale of 3D fabrication is immense and spans meter-size dies for airplane parts to tens of microns-level details (Figure 1).2–8 On a smaller length scale, the electron-beam community has long been developing techniques based on direct electron-beam deposition, where the electron beam at the gas–solid interface results in the formation of decomposition products. Subsequent motion of the e-beam along a predefined path allows for the creation of intricate 3D structures, with feature sizes as small
Nan Jiang, Department of Physics, Arizona State University, USA; [email protected] Eva Zarkadoula, Materials Science and Technology Division, Oak Ridge National Laboratory, USA; [email protected] Prineha Narang, John A. Paulson School of Engineering and Applied Sciences, Harvard University, USA; [email protected] Artem Maksov, Bredesen Center for Interdisciplinary Research and Graduate Education, University of Tennessee, Knoxville, USA; [email protected] Ivan Kravchenko, Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, USA; [email protected] Albina Borisevich, Materials Science and Engineering Division, Oak Ridge National Laboratory, USA; [email protected] Stephen Jesse, Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, USA; [email protected] Sergei V. Kalinin, Institute for Functional Imaging of Materials, and Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, USA; [email protected] doi:10.1557/mrs.20
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