Atomic-level insights through spectroscopic and transport measurements into the large-area synthesis of MoS 2 thin films
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esearch Letter
Atomic-level insights through spectroscopic and transport measurements into the large-area synthesis of MoS2 thin films Hassana Samassekou, Asma Alkabsh, Kenneth Stiwinter, Avinash Khatri, and Dipanjan Mazumdar, Department of Physics, Southern Illinois University, Carbondale, IL 62901, USA Address all correspondence to Dipanjan Mazumdar at [email protected] (Received 25 May 2018; accepted 6 August 2018)
Abstract Several structure–property relationships are reported in large-area MoS2 thin films to understand the effect of sulfur vacancies along with complementary first-principles calculations. X-ray diffraction and reflectivity measurements demonstrated that sputtered MoS2 followed by a high-temperature sulfurization produced sharp film–substrate interface along with high crystalline order. Spectroscopic and transport measurements showed that removal of sulfur vacancies promoted A–B excitons, strong in-plane Raman modes, a sharp increase in dc resistivity, and strong photo-conducting behavior. We have clearly demonstrated that a hybrid method using magnetron sputtering can provide highquality few-layer transition metal dichalcogenide films.
Introduction MoS2 remains one of the most extensively studied twodimensional materials in the transition-metal-dichalcogenide (TMDC) family.[1] Structurally, these novel materials are stacked together by Van-der-Waals forces.[2] Among the many remarkable properties shown by TMDCs, the existence of a tunable band gap, from indirect (1.3 eV, bulk) to direct (1.8 eV, monolayer) for MoS[23], is one of the attractive property.[4] Therefore, many electronic[1] and optoelectronic applications[5] are envisioned for such materials. Several growth techniques, classified as either top-down or bottom-up approaches, have been elaborated for 2D materials fabrication. However, the existing challenge of synthesis of scalable and high-quality TMDCs such as MoS2 persists. Popularized by the discovery of graphene,[6] top-down techniques which include liquid phase exfoliation[7] and micromechanical exfoliation,[8] produce flakes of typical small lateral size (
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