Chemical interaction between nitrogen and iron in silica glasses via sequential ion-implantation
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Chemical interaction between nitrogen and iron in silica glasses via sequential ion-implantation Tetsuhiko Isobea) Department of Applied Chemistry, Faculty of Science and Technology, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan
Tamotsu Toriyama Department of Energy Science and Engineering, Musashi Institute of Technology, Tamazutsumi 1-28-1, Setagaya-ku, Tokyo 158, Japan
Robert A. Weeks Department of Applied and Engineering Science, Vanderbilt University, Nashville, Tennessee 37235
Raymond A. Zuhr Solid State Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831 (Received 21 July 1997; accepted 10 November 1997)
Silica glass plates (Corning 7940 excimer grade) were implanted sequentially with N1 at 52 keV to different doses, ranging from 0 to 1.2 3 1017 ions cm22 , and then with Fe1 at 160 keV to 6 3 1016 ions cm22 at room temperature and 4 mA cm22 . The intensity of ferromagnetic magnetic resonance (FMR) absorption and the magnetization calculated by the angular dependence of the FMR field reach maxima at an NyFe atomic ratio ,0.2. Two peaks due to Fe 2p3/2 electron are observed at 707.2 6 0.2 and 710.9 6 0.2 eV in the x-ray photoelectron spectra. The intensity of the former relative to the latter decreases with increasing the N dose. The conversion electron M¨ossbauer spectrum reveals the formation of superparamagnetic iron nitride as well as the existence of Fe21 and Fe31 in silica when implanting N1 to 7.5 3 1015 ions cm22 and then 57 Fe1 to 6 3 1016 ions cm22 at NyFe 0.125. These results suggest that sequential ion-implantation of N1 and Fe1 produces iron nitride in silica glasses.
I. INTRODUCTION
Implantation of elemental ions into solids is a technique for modifying near surface properties of materials.1,2 In some cases, metallic particles can be formed when ions of the noble metal elements are implanted into SiO2 and TiO2 .1,3–5 For the case of implanting ions of first row transition elements into oxides, several oxide compounds, as well as metals, are created through the interaction of the implanted ions with the oxygen of the implanted solids.5–10 The interactions of implanted ions with a substrate are changed when another ion is implanted, and the effects on the implanted region of a solid differ from those of single ion implantation.11,12 These effects are also changed when the order of implantation of two ions is reversed. The compounds formed in these cases depend on the order of implantation.13–15 Fe1 -implanted silica glasses have been studied by magnetic resonance.16,17 Assuming that the implanted samples are ideal magnetic films, their magnetizations depend on the dose.16 To our knowledge, there are no
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J. Mater. Res., Vol. 13, No. 8, Aug 1998
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reports on the magnetic properties of the implantation of Fe and another ion. There are reports that magnetic properties for compounds of Fe and N depend on the r
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