Chemical Vapour Deposition An Integrated Engineering Design for Adva
The rapid advancement in chemical vapour deposition (CVD) technology has reached many fields of application, including thin film coating, microelectronics and communications. Chemical Vapour Deposition: An Integrated Engineering Design for Advanced Materi
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Series Editor Professor Brian Derby, Professor of Materials Science Manchester Materials Science Centre, Grosvenor Street, Manchester, M1 7HS, UK
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Computational Quantum Mechanics for Materials Engineers L. Vitos Modelling of Powder Die Compaction P.R. Brewin, O. Coube, P. Doremus and J.H. Tweed Silver Metallization D. Adams, T.L. Alford and J.W. Mayer Microbiologically Influenced Corrosion R. Javaherdashti Modeling of Metal Forming and Machining Processes P.M. Dixit and U.S. Dixit Electromechanical Properties in Composites Based on Ferroelectrics V.Yu. Topolov and C.R. Bowen Charged Semiconductor Defects E.G. Seebauer and M.C. Kratzer
Computational Mechanics of Composite Materials M. Kamiński
Modelling Stochastic Fibrous Materials with Mathematica® W.W. Sampson
Gallium Nitride Processing for Electronics, Sensors and Spintronics S.J. Pearton, C.R. Abernathy and F. Ren
Ferroelectrics in Microwave Devices, Circuits and Systems S. Gevorgian
Materials for Information Technology E. Zschech, C. Whelan and T. Mikolajick
Porous Semiconductors F. Kochergin and H. Föll
Fuel Cell Technology N. Sammes Casting: An Analytical Approach A. Reikher and M.R. Barkhudarov
Yongdong Xu · Xiu-Tian Yan
Chemical Vapour Deposition An Integrated Engineering Design for Advanced Materials
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Prof. Yongdong Xu† late of Northwestern Polytechnical University School of Materials Science & Engineering 710072 Xian China
Dr. Xiu-Tian Yan University of Strathclyde Department of Design, Manufacture and Engineering Management 75 Montrose St. Glasgow G1 1XJ UK [email protected]
ISSN 1619-0181 ISBN 978-1-84882-893-3 e-ISBN 978-1-84882-894-0 DOI 10.1007/978-1-84882-894-0 Springer London Dordrecht Heidelberg New York British Library Cataloguing in Publication Data A catalogue record for this book is available from the British Library Library of Congress Control Number: 2009940607 c Springer-Verlag London Limited 2010 Apart from any fair dealing for the purposes of research or private study, or criticism or review, as permitted under the Copyright, Designs and Patents Act 1988, this publication may only be reproduced, stored or transmitted, in any form or by any means, with the prior permission in writing of the publishers, or in the case of reprographic reproduction in accordance with the terms of licenses issued by the Copyright Licensing Agency. Enquiries concerning reproduction outside those terms should be sent to the publishers. The use of registered names, trademarks, etc., in this publication does not imply, even in the absence of a specific statement, that such names are exempt from the relevant laws and regulations a
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