Coupled chaotic vibration considering resonator mass change of micro-resonant gas sensor
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O R I G I NA L
Xiaorui Fu · Lizhong Xu
Coupled chaotic vibration considering resonator mass change of micro-resonant gas sensor
Received: 18 February 2020 / Accepted: 7 July 2020 © Springer-Verlag GmbH Germany, part of Springer Nature 2020
Abstract During gas measurement, there is a mass change of resonator in a micro-resonant gas sensor. If the design parameters are not selected rightly, there will be obvious vibration state change or even chaotic vibration during gas measurement. Here, using multi-field coupled nonlinear dynamics model considering mass change during gas adsorption and desorption, the nonlinear dynamics performance and chaotic vibration of the gas sensor are investigated. Effects of the initial clearance between resonator and base, excitation voltage and dynamic viscosity of the gas on the vibration states are analyzed. Considering mass change during gas adsorption and desorption, the stability intervals of the initial clearance, excitation voltage and dynamic viscosity of the gas are determined. Besides it, a proportional differential control link is used to tune the vibration state of the sensor. Results show that when mass change during gas adsorption and desorption is considered, the stability intervals of the initial clearance, excitation voltage and dynamic viscosity of the gas are reduced. To obtain stable operation performance, these parameters of the sensor should be selected properly. A proportional differential control link can tune the vibration state of the sensor easily. Keywords Gas sensor · Multi-field coupled · Mass change · Chaotic vibration 1 Introduction With the rapid development of micromachining technology, the silicon micro-resonance sensors become one of the most commonly used components for signal processing and various communication applications [1,2]. The micro-resonant sensor outputs frequency signals. It is not easy to be distorted during long-distance transmission and the measure circuit is simple, so it has been widely studied [3–5]. Among them, the study of dynamics performance for the micro-resonant sensors is particularly significant [6]. Moghimi et al. studied effects of the Casimir and van der Waals on the dynamic pull-in instability of a cantilever and a double-clamped beam by considering middle plane tension, electrostatic excitation, edge field and intermolecular force [7]. Kim et al. [8] analyzed the primary, secondary and superharmonic resonant behaviors of the cantilever beam and studied the influence of parameters and operating conditions on the resonance characteristics of the device by the perturbation method and the modal displacement asymptotic method. Li et al. [9] investigated the nonlinear dynamics of a thermally excited micro-resonant pressure sensor and analyzed the frequency output error of the sensor caused by nonlinear vibration. Nuryadi et al. [10] studied the dynamic performance of a resonant gas sensor using the Wheatstone bridge test method and measured the deflection variation in the micro-cantilever beam during vibration and the res
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