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have been actively investigated because of wide applications as high sensitivity gas sensors for reducing gas, high conversion efficiencies in SnO 2/Si solar cells, and liquid crystal displays, etc. [46] Thin SnO 2 films can be prepared by various methods, e.g. reactive sputtering, spray pyrolysis, chemical vapor deposition, high voltage anodization. [7-10] According to Cuomo et. aLl. 1], the composition of copper oxide film could be controlled by a variation of O/Cu relative arrival ratio using reactive ion beam assisted evaporation by low energy(

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