CVD-diamond nanoparticle synthesis for DLC film application
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RESEARCH PAPER
CVD-diamond nanoparticle synthesis for DLC film application Rebeca Falcão Borja de Oliveira Correia & Cristiane C. Wachesk & Carolina R. Hurtado & Djoille D. Damm & Thalita Sani Taiariol & Dayane Batista Tada & Getulio Vasconcelos & Evaldo J. Corat & Vladimir J. Trava-Airoldi
Received: 20 February 2020 / Accepted: 9 September 2020 # Springer Nature B.V. 2020
Abstract Diamond-like carbon (DLC) films have been extensively applied as a solid lubricant and as a protective coating due to their attractive chemical, mechanical, and tribological properties. Furthermore, these properties of DLC coatings can be improved with the incorporation of nanoparticles of different materials, especially diamond nanoparticles (DNPs). Herein, the incorporation of chemical vapor deposition (CVD) DNPs was done from a deionized aqueous colloidal solution by using a controlled pulsed valve, which is an innovative aspect of this work. The CVD DNPs were pulverized into the plasma region and incorporated in the DLC films bulk with controllable size particle distribution and density. In addition, an enhanced process to obtain DNPs with suitable size distribution was established by R. F. B. de Oliveira Correia (*) : C. C. Wachesk : C. R. Hurtado : D. D. Damm : T. S. Taiariol : D. B. Tada Federal University of São Paulo, Talim Street, 330 - Vila Nair, Sao Jose dos Campos, SP 12231-280, Brazil e-mail: [email protected] R. F. B. de Oliveira Correia : C. C. Wachesk : T. S. Taiariol : E. J. Corat : V. J. Trava-Airoldi National Institute for Space Research, Astronautas Avenue, 1.758 - Jardim da Granja, Sao Jose dos Campos, SP 12227-010, Brazil D. D. Damm Federal University of Bahia Recôncavo, Centenário Avenue, 697, Feira de Santana, BA 44042280, Brazil G. Vasconcelos Institute for Advanced Studies, Coronel Aviador José Alberto Albano do Amarante, 01 - Putim, Sao Jose dos Campos, SP 12228-001, Brazil
using a high energy ball milling technique, centrifugation, and a special chemical cleaning process. The DLC films were deposited on a metallic substrate via a modified, pulsed DC plasma-enhanced chemical vapor deposition (PECVD) technique, with an additional cathode. X-ray diffractometry (XRD) and scanning electronic microscopy (SEM) techniques showed that an aqueous colloidal solution of high-purity DNPs with a mean diameter of 32 nm was obtained. Dynamic light scattering (DLS) results showed that it is possible to control particle size distribution by varying the milling and centrifugation time lengths. Therefore, a valuable result was that DLC films could be deposited with DNPs by using clean water without affecting deposition rate, the adhesion between the DLC films and substrates, the structural quality of the film, and keeping lower coefficient of friction. Keywords DLC film . DLC with diamond nanoparticles . CVD diamond nanoparticles . Aqueous colloidal solution . Pulsed valve . Coatings
Introduction The deposition of diamond-like carbon (DLC) films with incorporated nanoparticles can significantly improve their mechanical
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