Deposition of diamond phase carbon films on surface pretreated stainless steel substrate
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The deposition of diamond phase carbon films on stainless steel substrates by an ionized deposition technique has been studied. A molybdenum grid used during argon ion sputtering had a decisive role in improving the morphology and adhesion ability of the substrate surface. The chemical composition of the surface was obtained by x-ray photoelectron spectroscopy, indicating the reduction of oxygen, carbon, and other contamination, while the surface morphology of the substrate obtained by scanning electron microscopy showed less roughness with a partially smooth surface. Attempts to extract the deposited films from the pretreated substrate surface by a superadhesive agent with an adhesion of 250 kg/cm 2 failed, yielding a much stronger adhesion for the pretreated surface. This fact was also supported by examining the surface morphology, hardness, and the resistivity of the films deposited on the same substrates. As for the crystal structure of diamond phase carbon films on stainless steel, selected area diffraction patterns obtained from transmission electron microscopy suggested a mixture of amorphous carbon and polycrystalline diamond components.
I. INTRODUCTION Diamond-like carbon (DLC) films grown by various deposition techniques1^9 are the subject of many investigations because of their appealing properties such as extreme hardness, chemical inertness, high resistivity, optical transparency, etc. These unique properties, as well as the possibility of fabricating them at low temperatures and pressures, have attracted the interest of many researchers. From an application point of view, deposition of DLC films on various kinds of substrates is very desirable; however, the mechanical and chemical properties of the substrate surface and the microstructure of the substrate material are known to exercise a decisive influence on film growth conditions. Therefore, the pretreatment of the substrate surface can play an important role in order to improve the adhesion ability of the substrate surface. Ham and Lou10 reported the deposition of DLC on a variety of substrates, and their results indicated that nonadherent films could be grown on Au, Cu, and W. Morotta et al. also reported the deposition of DLC films on copper substrates that were used as electrical insulators in copper heatsinks for semiconductor devices.11 However, there are fewer papers reporting methods that could improve the adhesive properties of substrates with poor or no adhesion. In the present paper, the pretreatment of stainless steel substrate surfaces by ionized deposition is aimed to improve the adhesiveness of the surface. The chemical composition of the surface before and after pretreatment, and the interface of the film and the substrate, were 2840
http://journals.cambridge.org
J. Mater. Res., Vol. 8, No. 11, Nov 1993
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carefully studied. The process of depositing diamond phase carbon (DPC) films5'12 on pretreated stainless steel substrates together with some of its physical and structural properties is also examined. II.
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