Design, analysis, and testing of a novel 2-DOF vibration-assisted polishing device driven by the piezoelectric actuators
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ORIGINAL ARTICLE
Design, analysis, and testing of a novel 2-DOF vibration-assisted polishing device driven by the piezoelectric actuators Yan Gu 1 & Xingxin Duan 1 & Jieqiong Lin 1 & Allen Yi 2 & Mingshuo Kang 1 & Jijun Jiang 1 & Weidong Zhou 1 Received: 6 March 2020 / Accepted: 1 September 2020 # Springer-Verlag London Ltd., part of Springer Nature 2020
Abstract In order to increase surface quality and material removal efficiency, a 2-DOF vibration-assisted polishing device driven by piezoelectric actuators (PZTs) was developed. The matrix-based compliance modeling (MCM) method was used to calculate stiffness, and Lagrange’s method was used to analyze the natural frequency of the device. To make the 2-DOF vibration-assisted polishing device achieve better performance, the dimensions of the device were optimized by the Whale optimization algorithm (WOA). Meanwhile, FEA was used in simulation and analysis of the device. The open-loop testing results show that the 2-DOF vibration-assisted polishing device has the characteristics of large stroke and high resolution. The polishing experimental results show that vibration-assisted polishing can improve the surface quality and material removal rate. Keywords Vibration-assisted polishing . Piezoelectric actuator (PZT) . Whale optimization algorithm (WOA) . Silicon carbide (SiC) ceramic
1 Introduction With the development of modern science and technology, especially advanced science and technology, such as aerospace and national defense information microelectronics and optoelectronics, there is a growing demand for optical components. High-power laser systems such as mirror glass for astronomical telescopes, folding mirrors for avionics displays, reflector electronic substrates, and biomedical imaging substrates require optical elements with high-precision surface gloss [1]. Most of the optical components are hard and brittle materials, including all kinds of optical glass semiconductor materials, such as silicon, germanium, silicon carbide, etc. However, hard and brittle materials tend to produce surface and subsurface damage; the surface of the optical element is * Yan Gu [email protected] Jieqiong Lin [email protected] 1
Key Laboratory of Micro-Nano and Ultra-precision manufacturing of Jilin Province, Changchun University of Technology, Changchun 130012, People’s Republic of China
2
Department of Industrial, Welding and Systems Engineering, Ohio State University, Columbus, OH 43210, USA
very high compared with the requirement of accuracy and surface finish, so the manufacture of optical components is a challenge. Polishing can eliminate surface scratches and surface damage and improve the quality of the surface of optical components; polishing is a very critical step in the processing of optical components [2–5]. For the difficult-to-machine materials, such as silicon carbide, Han et al. proposed a novel polishing technique named plasma-assisted polishing (PAP), and the mechanical and chemical properties of silicon carbide surface were modified by helium-ba
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