Design and Construction of a Low-Force Stylus Probe for On-machine Tool Cutting Edge Measurement
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ORIGINAL ARTICLE
Design and Construction of a Low‑Force Stylus Probe for On‑machine Tool Cutting Edge Measurement Hiraku Matsukuma1 · Bo Wen1 · Shinichi Osawa1 · Sho Sekine1 · Yuki Shimizu1 · Wei Gao1 Received: 28 July 2020 / Revised: 30 October 2020 / Accepted: 9 November 2020 © International Society for Nanomanufacturing and Tianjin University and Springer Nature Singapore Pte Ltd. 2020
Abstract A new on-machine profiler employing a cantilever beam was proposed and developed to measure the sharp micro-cutting edges of precision cutting tools with low measuring force of 0.1 mN. The proposed profiler consists of a probe unit and a positioning unit. The probe unit employs a stylus mounted on the free end of a hollow triangular cantilever beam and a laser displacement sensor to detect the deflection of the cantilever beam. The positioning unit consists of two single-axis DC servo motor stages for precise positioning of the probe unit. The cantilever is designed with the assistance of the finite element method. In order to demonstrate the feasibility of the proposed measurement system, experiments are conducted and the measurement result for a micro-cutting edge is compared with that by a commercial profiler. Furthermore, a method to compensate for the measurement error caused by the lateral displacement of the cantilever beam is proposed. The compensated measurement results show good agreement within ± 2 μm with those obtained by the commercial profiler. Keywords On-machine measurement · Surface profiler · Micro-cutting edge · Low-force measurement · Cantilever beam
1 Introduction Precision cutting tools are widely used in the machining of various parts with complex microstructures that require high machining accuracy, and they are used in a variety of industrial fields, including the semiconductor industry [1, 2]. In order to guarantee the quality of the product, it is necessary to produce cutting tools with precision sharp edges with micrometer-scale surface profiles. Geometric parameters such as the geometric profile of the cutting edge of a precision cutting tool, the cutting edge angle, the radius of curvature, the height and width of the cutting edge, and other geometric parameters have a significant influence on the machining accuracy of the product. Generally, the micro-cutting edges of precision cutting tools are fabricated through precision grinding. However, since precision cutting tools are made of hard materials, it is difficult to machine the precision cutting edges of precision cutting tools accurately. This requires repeated grinding and profiling of precision cutting tools to ensure the accuracy * Hiraku Matsukuma [email protected] 1
Department of Finemechanics, Graduate School of Engineering, Tohoku University, Sendai, Japan
[3, 4]. Off-machine measurement requires removal of the workpiece from the machining tool for profile measurement and remounting to the machining tool after measurement [4]. This time-consuming and complex operation not only results in assembly e
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