Design and Manufacturing of Active Microsystems
This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on
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S. Büttgenbach A. Burisch J. Hesselbach (Eds.)
Design and Manufacturing of Active Microsystems
123
mems
microtechnology and mems
microtechnology and mems Series Editor: H. Fujita D. Liepmann The series Microtechnology and MEMS comprises text books, monographs, and state-of-the-art reports in the very active field of microsystems and microtechnology. Written by leading physicists and engineers, the books describe the basic science, device design, and applications. They will appeal to researchers, engineers, and advanced students.
Please view available titles in Microtechnology and Mems on series homepage http://www.springer.com/series/4526
Stephanus Büttgenbach Arne Burisch Jürgen Hesselbach
Editors
Design and Manufacturing of Active Microsystems
Editors Prof. Dr. Stephanus Büttgenbach Technische Universität Braunschweig Institut für Mikrotechnik Langer Kamp 8 38106 Braunschweig Germany [email protected]
Dipl.-Ing. Arne Burisch Technische Universität Braunschweig Institut für Werkzeugmaschinen und Fertigungstechnik Langer Kamp 19 B 38106 Braunschweig Germany [email protected]
Prof. Dr.-Ing. Dr. h.c. Jürgen Hesselbach Technische Universität Braunschweig Institut für Werkzeugmaschinen und Fertigungstechnik Langer Kamp 19 B 38106 Braunschweig Germany [email protected]
ISSN 1615-8326 e-ISBN 978-3-642-12903-2 ISBN 978-3-642-12902-5 DOI 10.1007/978-3-642-12903-2 Springer Heidelberg Dordrecht London New York Library of Congress Control Number: 2011923525 © Springer-Verlag Berlin Heidelberg 2011 This work is subject to copyright. All rights are reserved, whether the whole or part of the material is concerned, specifically the rights of translation, reprinting, reuse of illustrations, recitation, broadcasting, reproduction on microfilm or in any other way, and storage in data banks. Duplication of this publication or parts thereof is permitted only under the provisions of the German Copyright Law of September 9, 1965, in its current version, and permission for use must always be obtained from Springer. Violations are liable to prosecution under the German Copyright Law. The use of general descriptive names, registered names, trademarks, etc. in this publication does not imply, even in the absence of a specific statement, that such names are exempt from the relevant protective laws and regulations and therefore free for general use.
Cover design: WMXDesign GmbH Printed on acid-free paper Springer is part of Springer Science+Business Media (www.springer.com)
Preface
Microsystems technology, which is considered to be a key technology for the 21st century, integrates signal processing with miniaturized sensors and actuators. This opens up a whole range of new applications going beyond purely microelectronics systems. For some time now, microsystem products have emerged as an important part of our everyday lives as witnessed by their successful application in various fields such as car-making, biomedical engineering and communications technology. Whereas the field of microsensors is already highly a
