Development of High Power Green Light Emitting Diode Chips
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Development of High Power Green Light Emitting Diode Chips Christian Wetzel and T. Detchprobhm MRS Internet Journal of Nitride Semiconductor Research / Volume 10 / January 2005 DOI: 10.1557/S1092578300000533, Published online: 13 June 2014
Link to this article: http://journals.cambridge.org/abstract_S1092578300000533 How to cite this article: Christian Wetzel and T. Detchprobhm (2005). Development of High Power Green Light Emitting Diode Chips . MRS Internet Journal of Nitride Semiconductor Research, 10, pp e2 doi:10.1557/S1092578300000533 Request Permissions : Click here
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MRS
Internet Journal Nitride Semiconductor Research
Development of High Power Green Light Emitting Diode Chips Christian Wetzel12 and T. Detchprohm12 1Future
Chips Constellation, of Physics, Applied Physics and Astronomy,
2Department
(Received Monday, July 25, 2005; accepted Thursday, August 18, 2005)
The development of high emission power green light emitting diodes chips using GaInN/GaN multi quantum well heterostructures on sapphire substrate in our group is being reviewed. We analyze the electronic bandstructure in highly polarized GaInN/GaN quantum wells to identify the appropriate device structures. We describe the optimization of the epitaxial growth for highest device performance. Applying several optimization schemes, we find that lateral smoothness and homogeneity of the active region as characterized by atomic force microscopy is a most telling character of high yield, high output power devices emitting near 525 nm. In un-encapsulated epi-up mounted (400 µm)2 die we achieve 2.5 mW at 20 mA at 525 nm. We describe die performance, wafer yield, and process stability, and reproducibility for our production-scale implementation of this green LED die process.
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Introduction
Development of solid state lighting by means of light emitting diodes (LEDs) [1] [2] [3] is an opportunity to lower the primary energy consumption significantly worldwide [4] [5] [6]. In the United States of America about 20% of all primary energy sources are being consumed for the purpose of lighting. Under realistic projections of the development and commercialization potential of high brightness semiconductor LEDs, as much as 28% of that amount can be saved. This amounts to the equivalent of 222 million barrels of crude oil every year. By 2002, research, development, and commercialization of high brightness LEDs has led to a 1.82 Billion-$/year world market [7]. This is about the volume of the US retail market sales for scented candles [8]. Market projections, however, foresee an averaged annual growth of the order of 20% for high brightness LEDs quickly outpacing the more traditional lighting market [9]. The potential and projected energy savings rely on the concept of generating visible light without the
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