Development of Magneto-Optical Imaging for High-Throughput Characterization of Combinatorial Magnetic Thin Films
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Development of Magneto-Optical Imaging for High-Throughput Characterization of Combinatorial Magnetic Thin Films X. R. Zhao1, N. Okazaki1, Y. Konishi2, K. Akahane2, Z. Kuang3, T. Ishibashi3, K. Sato3, H. Koinuma1,4, and T. Hasegawa1,5 1 National Institute for Materials Science, 1-1 Namiki, Tsukuba, Ibaraki 305-0044, Japan 2 Neoark Corporation, 2-8-33 Wakamatsu-cho, Fuchu, Tokyo 183-0005, Japan 3 Department of Applied Physics, Faculty of Technology, Tokyo University of Agriculture and Technology, Koganei, Tokyo 184-8588, Japan 4 Materials and Structures Laboratory, Tokyo Institute of Technology, 4259 Nagatsuta-cho, Midori-ku, Yokohama 226-8503, Japan 5 Frontier Collaborative Research Center, Tokyo Institute of Technology, 4259 Nagatsuta-cho, Midori-ku, Yokohama 226-8503, Japan ABSTRACT A new magneto-optical (MO) imaging system for high-throughput characterization of combinatorial magnetic thin films has been developed. The instrument allows us to measure both Faraday rotation and ellipticity maps at various wavelengths (400 nm~1000 nm), different magnetic fields (0~2000 G), and different temperatures (12 K~300 K) for wide variety of materials. We used the magnetic circular dichroism (MCD) modulation technique to map MO properties, relatively free from substrate effects. The superiority of this system is that magnetic hysteresis curves of numerous specimens with different compositions prepared by the combinatorial technique can be simultaneously measured at one sweep of magnetic field, providing an efficient characterization method for combinatorial magnetic materials. We also confirmed that the system possesses enough spatial resolution and sensitivity for detecting MO signals of individual pixels contained in a combinatorial library. INTRODUCTION Information about magneto-optical (MO) properties is very important in many application fields, such as biasing of ring lasers [1] and magneto-optical storage [2]. Moreover, recent dramatic improvements of MO characterization tools [3-7] have been stimulating new basic researches, including studies of giant MO response of bismuth-substituted ferrite garnet films [8], domain formation in magnetic materials [9], flux penetration into superconductors [10], magnetic alloys [11], diluted magnetic semiconductors [12], and artificial superlattices [13, 14].
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However, high throughput characterization for the MO properties of combinatorial libraries has scarcely been attempted so far [11,12], because it is needed not only to resolve small pixels of µm scales but also to evaluate them quantitatively. In this paper, we present a new magneto-optical imaging system, suitable for fast measurements and quantitative data analyses of combinatorial libraries in thin film forms. EXPERIMENTAL SETUP The configurations of MO characterization systems reported so far can be classified into two categories, according to the condition of polarized light. One is based on a conventional optical microscope, which uses linearly polarized light in the transmission or reflection geometry
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