Development of surface reconstruction algorithms for optical interferometric measurement
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REVIEW ARTICLE
Dongxu WU, Fengzhou FANG
Development of surface reconstruction algorithms for optical interferometric measurement
© The Author(s) 2020. This article is published with open access at link.springer.com and journal.hep.com.cn
Abstract Optical interferometry is a powerful tool for measuring and characterizing areal surface topography in precision manufacturing. A variety of instruments based on optical interferometry have been developed to meet the measurement needs in various applications, but the existing techniques are simply not enough to meet the ever-increasing requirements in terms of accuracy, speed, robustness, and dynamic range, especially in on-line or on-machine conditions. This paper provides an in-depth perspective of surface topography reconstruction for optical interferometric measurements. Principles, configurations, and applications of typical optical interferometers with different capabilities and limitations are presented. Theoretical background and recent advances of fringe analysis algorithms, including coherence peak sensing and phase-shifting algorithm, are summarized. The new developments in measurement accuracy and repeatability, noise resistance, self-calibration ability, and computational efficiency are discussed. This paper also presents the new challenges that optical interferometry techniques are facing in surface topography measurement. To address these challenges, advanced techniques in image stitching, onmachine measurement, intelligent sampling, parallel computing, and deep learning are explored to improve the functional performance of optical interferometry in future manufacturing metrology.
Received April 28, 2020; accepted July 16, 2020
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Dongxu WU, Fengzhou FANG ( ) Centre of Micro/Nano Manufacturing Technology (MNMT-Dublin), University College Dublin, Dublin 4, Ireland E-mail: [email protected] Dongxu WU School of Control Engineering, Northeastern University at Qinhuangdao, Qinhuangdao 066004, China Fengzhou FANG State Key Laboratory of Precision Measuring Technology and Instruments, Centre of Micro/Nano Manufacturing Technology (MNMT), Tianjin University, Tianjin 300072, China
Keywords surface topography, measurement, optical interferometry, coherence envelope, phase-shifting algorithm
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Introduction
The functional performance of a workpiece is greatly influenced by its surface topography, including surface form and surface texture. Surface topography carries the significant traces of its manufacturing process, varying from traditional manufacturing, such as cutting, grinding, and polishing, to advanced and nontraditional manufacturing techniques, such as diamond turning [1], magnetorheological finishing [2], plasma polishing [3], and additive manufacturing [4]. Obtaining highly accurate and repeatable surface measurements of the workpiece is critical for the process of quality control, design improvement, and final product acceptance [5]. Surface metrology is a fundamental and indispensable part of precision manufacturing, whose broad applications can be
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